Publications

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2022

A. Alipour; E. Fowler; S. O. R. Moheimani; J. H. G. Owen; J. N. Randall

Atomic-resolution lithography with an on-chip scanning tunneling microscope Journal Article

Journal of Vacuum Science & Technology B , 40 , pp. 030603 (5pp), 2022.

BibTeX | Tags: MEMS STM | Links:

N. Nikooienejad; S. O. R. Moheimani

Convex Synthesis of SNI Controllers Based on Frequency-Domain Data: MEMS Nanopositioner Example Journal Article

IEEE Transactions on Control Systems Technology, 30 (2), pp. 767-778, 2022.

BibTeX | Tags: MEMS STM | Links:

2021

A. Alipour; S. O. R. Moheimani; J. H. G. Owen; E. Fuchs; J. N. Randall

Atomic precision imaging with an on-chip STM integrated into a commercial UHV STM system Journal Article

Journal of Vacuum Science & Technology B , 39 (4), 2021.

BibTeX | Tags: MEMS STM | Links:

A. Alipour; M. B. Coskun; S. O. R. Moheimani

A MEMS nanopositioner with integrated tip for scanning tunneling microscopy Journal Article

IEEE Journal of Microelectromechanical Systems , 30 (2 ), pp. 271 – 280, 2021.

BibTeX | Tags: MEMS STM | Links:

2019

A. Alipour; M. B. Coskun; S. O. R. Moheimani

A High Bandwidth Microelectromechanical System-Based Nanopositioner for Scanning Tunneling Microscopy Journal Article

Review of Scientific Instruments, 90 (7), pp. 073706, 2019.

BibTeX | Tags: MEMS STM | Links:

2018

M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS in Nanopositioning Inproceedings

16th International Conference on New Actuators, ACTUATOR 2018 , Bremen, Germany, 2018.

BibTeX | Tags: MEMS STM

2017

M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS for Nanopositioning: Design and Applications Journal Article

IEEE Journal of Microelectromechanical Systems, 26 (3), pp. 469–500, 2017.

BibTeX | Tags: MEMS STM | Links:

2016

Y. Zhu; S. O. R. Moheimani; M. R. Yuce; A. Bazaei

Control Issues of MEMS Nanopositioning Devices Book Chapter

C. Ru; X. Liu; Y. Sun (Ed.): Nanopositioning Technologies: Fundamentals and Applications, 2016.

BibTeX | Tags: MEMS STM

2015

M. Maroufi; A. Bazaei; S. O. R. Moheimani

A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control Journal Article

IEEE Transactions on Control Systems Technology, 23 (2), pp. 504-512, 2015.

BibTeX | Tags: MEMS STM | Links:

2013

M. Maroufi; S. O. R. Moheimani

Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner Inproceedings

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013.

BibTeX | Tags: MEMS STM