Publications

424 entries « 1 of 9 »

2022

A. Alipour; E. Fowler; S. O. R. Moheimani; J. H. G. Owen; J. N. Randall

Atomic-resolution lithography with an on-chip scanning tunneling microscope Journal Article

In: Journal of Vacuum Science & Technology B , vol. 40, pp. 030603 (5pp), 2022.

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N. Nikooienejad; S. O. R. Moheimani

Convex Synthesis of SNI Controllers Based on Frequency-Domain Data: MEMS Nanopositioner Example Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 30, no. 2 , pp. 767-778, 2022.

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H. M. Nasrabadi; M. Mahdavi; S. O. R. Moheimani

Q Control of an AFM Microcantilever with Double-Stack AlN Sensors and Actuators Journal Article

In: IEEE Sensors Journal, vol. 22, no. 5, pp. 3957-3964, 2022.

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2021

N. Nikooienejad; S. O. R. Moheimani

Frequency Domain-Based Integral Resonant Controller Design for a MEMS Nanopositioner Inproceedings

In: IEEE Conference on Control Technology and Applications, San Diego, CA, 2021.

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A. Alipour; S. O. R. Moheimani; J. H. G. Owen; E. Fuchs; J. N. Randall

Atomic precision imaging with an on-chip STM integrated into a commercial UHV STM system Journal Article

In: Journal of Vacuum Science & Technology B , vol. 39, no. 4, 2021.

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H. Alemansour; S. O. R. Moheimani; J. H. G. Owen; J. N. Randall; E. Fuchs

An ultra-fast method for scanning tunneling spectroscopy Journal Article

In: Journal of Vacuum Science & Technology B , vol. 39, no. 4, 2021.

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V. Visalakshi; S. Share; S. O. R. Moheimani; B. Bhikkaji

Design of Positive Position Feedback Controllers for Collocated Systems Inproceedings

In: Proc. American Control Conference, pp. 4791–4796, New Orleans, LA, 2021.

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A. Alipour; M. B. Coskun; S. O. R. Moheimani

A MEMS nanopositioner with integrated tip for scanning tunneling microscopy Journal Article

In: IEEE Journal of Microelectromechanical Systems , vol. 30, no. 2 , pp. 271 – 280, 2021.

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M. Mahdavi; H. M. Nasrabadi; M. Soleymaniha; S. O. R. Moheimani

Modal Actuation and Sensing with an Active AFM Cantilever Journal Article

In: IEEE Sensors Journal, vol. 21, no. 7, pp. 8950–8959, 2021.

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M. Soleymaniha; M. B. Coskun; H. M. Nasrabadi; A. Alipour; S. O. R. Moheimani

DESIGN, FABRICATION AND CHARACTERIZATION OF ACTIVE ATOMIC FORCE MICROSCOPE CANTILEVER ARRAYS Inproceedings

In: The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), 2021.

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H. Alemansour; S. O. R. Moheimani; J. H. G. Owen; E. Fuchs; J. N. Randall

High signal-to-noise ratio differential conductance spectroscopy Journal Article

In: Journal of Vacuum Science & Technology B , vol. 39, no. 1, pp. 010601 (5pp), 2021.

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2020

N. Nikooienejad; M. Mahdavi; S. O. R. Moheimani

Q-Controlled Microcantilevers with A Collocated Piezoelectric Actuator-Sensor Pair for Multifrequency AFM Inproceedings

In: 8th Multifrequency AFM Conference, Madrid, Spain, 2020.

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N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Iterative Learning Control for Video-rate Atomic Force Microscopy Journal Article

In: IEEE/ASME Transactions on Mechatronics, vol. 26, no. 4, pp. 2127 - 2138, 2020.

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M. Mahdavi; N. Nikooienejad; S. O. R. Moheimani

AFM microcantilever with a collocated AlN sensor-actuator pair: enabling efficient Q-control for dynamic imaging Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 29, no. 5, pp. 661 - 668, 2020.

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H. Alemansour; S. O. R. Moheimani; J. H. G. Owen; J. N. Randall; E. Fuchs

Controlled removal of hydrogen atoms from H-terminated silicon surfaces Journal Article

In: Journal of Vacuum Science & Technology B , vol. 38, no. 4, pp. 040601, 2020.

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O. Kaveh; M. B. Coskun; M. Mahdavi; S. O. R. Moheimani

FPGA-Based Characterization and Q-Control of an Active AFM Cantilever Inproceedings

In: 2020 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), Boston, MA, USA, 2020.

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M. Maroufi; H. Alemansour; S. O. R. Moheimani

A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 29, no. 3, pp. 397 - 407, 2020.

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S. O. R. Moheimani; H. Alemansour

A new approach to removing H atoms in hydrogen depassivation lithography Inproceedings

In: SPIE Conference on Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, pp. 113240Y, 2020.

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J. N. Randall; J. H. G. Owen; E. Fuchs; R. Saini; R. Santini; S. O. R. Moheimani

Atomically precise digital e-beam lithography Inproceedings

In: SPIE Conference on Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, pp. 113240X, 2020.

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M. Mahdavi; M. B. Coskun; S. O. R. Moheimani

High Dynamic Range AFM Cantilever with A Collocated Piezoelectric Actuator-Sensor Pair Journal Article

In: IEEE Journal of Microelectromechanical Systems , vol. 29, no. 21, pp. 260–267, 2020.

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M. Maroufi; N. Nikooienejad; M. Mahdavi; S. O. R. Moheimani

SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 29, no. 1, pp. 43–53, 2020.

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M. Mahdavi; M. B. Coskun; H. M. Nasrabadi; S. O. R. Moheimani

A high dynamic range AFM probe with collocated piezoelectric transducer pairs Inproceedings

In: The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020), 2020.

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N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani

Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 28, no. 21, pp. 436 - 447, 2020.

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2019

N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Iterative Learning Control for High-Speed Rosette Trajectory Tracking Inproceedings

In: IEEE Conference on Decision and Control , Nice, France, 2019.

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H. Alemansour; M. Maroufi; A. Alipour; S. O. R. Moheimani

A Feedback Controlled MEMS Probe Scanner for On-Chip AFM Inproceedings

In: 8th IFAC Symposium on Mechatronic Systems, Vienna, Austria, 2019.

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F. Tajaddodianfar; S. O. R. Moheimani; J. N. Randall

Scanning Tunneling Microscope Control: A Self-Tuning PI Controller Based on Online Local Barrier Height Estimation Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 27, no. 5, pp. 2004 - 2015, 2019.

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M. B. Coskun; H. Alemansour; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

Q Control of an Active AFM CantileverWith Differential Sensing Configuration Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 27, no. 5, pp. 2271 - 2278, 2019.

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M. B. Coskun; M. Baan; A. Alipour; S. O. R. Moheimani

Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array Inproceedings

In: 2019 IEEE Conference on Control Technology and Applications (CCTA), Hong Kong, China, 2019.

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A. Alipour; M. B. Coskun; S. O. R. Moheimani

A High Bandwidth Microelectromechanical System-Based Nanopositioner for Scanning Tunneling Microscopy Journal Article

In: Review of Scientific Instruments, vol. 90, no. 7, pp. 073706, 2019.

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N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design Journal Article

In: Review of Scientific Instruments, vol. 90, pp. 073702 (10pp), 2019.

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N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Characterization of a Tilted-Beam Piezoresistive MEMS Sensor with Current-Drive Readout Circuit Inproceedings

In: American Control Conference, Philadelphia, PA, USA, 2019.

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M. Maroufi; A. Alipour; H. Alemansour; S. O. R. Moheimani

Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy Inproceedings

In: International Conference on Manipulation Automation and Robotics at Small Scales, Helsinki, Finland, 2019.

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2018

M. Maroufi; H. Alemansour; M. B. Coskun; S. O. R. Moheimani

An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control Journal Article

In: Mechatronics, vol. 56, pp. 198–210, 2018.

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J. N. Randall; J. Owen; J. Lake; R. Saini; E. Fuchs; M. Mahdavi; S. O. R. Moheimani; B. Carrion-Schaefer

Highly parallel scanning tunneling microscope based hydrogen depassivation lithography Journal Article

In: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, vol. 36, no. 6, pp. 06JL05, 2018.

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S. O. R. Moheimani

A Connection Between Stability of STM Control System and Local Barrier Height: Implications on Imaging and Lithography Miscellaneous

Presented at the AVS 65th International Symposium & Exhibition, Long Beach, CA, Oct 21-26, 2018, 2018, (Invited Paper).

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N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

A novel non-raster scan method for AFM imaging Inproceedings

In: ASME Dynamic Systems and Control Conference, Atlanta, Georgia, 2018.

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N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani

Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy Inproceedings

In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018, Auckland, New Zealand, 2018.

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I. R. Petersen; S. O. R. Moheimani

Special Issue on Recent Emerging Technologies in Atomic Force Microscopy Journal Article

In: Asian Journal of Control, vol. 20, no. 4, pp. 1315–-1316, 2018.

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A. Alipour; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner Inproceedings

In: AMERICAN CONTROL CONFERENCE, Milwaukee, Wisconsin, 2018.

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M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS in Nanopositioning Inproceedings

In: 16th International Conference on New Actuators, ACTUATOR 2018 , Bremen, Germany, 2018.

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F. Tajaddodianfar; S. O. R. Moheimani; J. Owen; J. Ballard; E. Fuchs; J. N. Randall

Self-tuning PI Control for STM Tip ProtectionTaj Miscellaneous

Presented at the 62nd International Conference on Electron, Ion and Photon Beam Technology \& Nanofabrication, Puerto Rico May 29 – June 1, 2018, 2018.

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A. Bazaei; Z. Chen; Y. K. Yong; S. O. R. Moheimani

A novel state transformation approach to tracking of piecewise linear trajectories Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 26, no. 1, pp. 128–138, 2018.

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F. Tajaddodianfar; S. O. R. Moheimani; J. Owen; J. N. Randall

On the effect of local barrier height in scanning tunneling microscopy: Measurement methods and control implications Journal Article

In: Review of Scientific Instruments, vol. 89, no. 1, pp. 013701, 2018.

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2017

M. B. Coskun; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 6, pp. 1287 – 1297, 2017.

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D. Dong; S. O. R. Moheimani; V. Ugrinovskii

The Ian Petersen 60th Birthday Workshop [Conference Reports] Journal Article

In: Control Systems Magazine, vol. 37, no. 5, pp. 93–94, 2017.

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F. Tajaddodianfar; S. O. R. Moheimani; J. Owen; J. N. Randall

A Self-Tuning Controller for High-Performance Scanning Tunneling Microscopy Inproceedings

In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

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A. G. Fowler; M. B. Coskun; S. O. R. Moheimani

Q Control of a Microfabricated Piezoelectric Cantilever with On-Chip Feedthrough Cancellation Inproceedings

In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

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A. Bazaei; M. Maroufi; S. O. R. Moheimani

Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control Inproceedings

In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

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M. Maroufi; H. Alemansour; S. O. R. Moheimani

A Closed-Loop MEMS Force Sensor with Adjustable Stiffness Inproceedings

In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

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M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS for Nanopositioning: Design and Applications Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 3, pp. 469–500, 2017.

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424 entries « 1 of 9 »