2022
Atomic-resolution lithography with an on-chip scanning tunneling microscope Journal Article
In: Journal of Vacuum Science & Technology B , vol. 40, pp. 030603 (5pp), 2022.
Convex Synthesis of SNI Controllers Based on Frequency-Domain Data: MEMS Nanopositioner Example Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 30, no. 2 , pp. 767-778, 2022.
Q Control of an AFM Microcantilever with Double-Stack AlN Sensors and Actuators Journal Article
In: IEEE Sensors Journal, vol. 22, no. 5, pp. 3957-3964, 2022.
2021
Frequency Domain-Based Integral Resonant Controller Design for a MEMS Nanopositioner Inproceedings
In: IEEE Conference on Control Technology and Applications, San Diego, CA, 2021.
Atomic precision imaging with an on-chip STM integrated into a commercial UHV STM system Journal Article
In: Journal of Vacuum Science & Technology B , vol. 39, no. 4, 2021.
An ultra-fast method for scanning tunneling spectroscopy Journal Article
In: Journal of Vacuum Science & Technology B , vol. 39, no. 4, 2021.
Design of Positive Position Feedback Controllers for Collocated Systems Inproceedings
In: Proc. American Control Conference, pp. 4791–4796, New Orleans, LA, 2021.
A MEMS nanopositioner with integrated tip for scanning tunneling microscopy Journal Article
In: IEEE Journal of Microelectromechanical Systems , vol. 30, no. 2 , pp. 271 – 280, 2021.
Modal Actuation and Sensing with an Active AFM Cantilever Journal Article
In: IEEE Sensors Journal, vol. 21, no. 7, pp. 8950–8959, 2021.
DESIGN, FABRICATION AND CHARACTERIZATION OF ACTIVE ATOMIC FORCE MICROSCOPE CANTILEVER ARRAYS Inproceedings
In: The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), 2021.
High signal-to-noise ratio differential conductance spectroscopy Journal Article
In: Journal of Vacuum Science & Technology B , vol. 39, no. 1, pp. 010601 (5pp), 2021.
2020
Q-Controlled Microcantilevers with A Collocated Piezoelectric Actuator-Sensor Pair for Multifrequency AFM Inproceedings
In: 8th Multifrequency AFM Conference, Madrid, Spain, 2020.
Iterative Learning Control for Video-rate Atomic Force Microscopy Journal Article
In: IEEE/ASME Transactions on Mechatronics, vol. 26, no. 4, pp. 2127 - 2138, 2020.
AFM microcantilever with a collocated AlN sensor-actuator pair: enabling efficient Q-control for dynamic imaging Journal Article
In: IEEE Journal of Microelectromechanical Systems, vol. 29, no. 5, pp. 661 - 668, 2020.
Controlled removal of hydrogen atoms from H-terminated silicon surfaces Journal Article
In: Journal of Vacuum Science & Technology B , vol. 38, no. 4, pp. 040601, 2020.
FPGA-Based Characterization and Q-Control of an Active AFM Cantilever Inproceedings
In: 2020 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), Boston, MA, USA, 2020.
A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor Journal Article
In: IEEE Journal of Microelectromechanical Systems, vol. 29, no. 3, pp. 397 - 407, 2020.
A new approach to removing H atoms in hydrogen depassivation lithography Inproceedings
In: SPIE Conference on Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, pp. 113240Y, 2020.
Atomically precise digital e-beam lithography Inproceedings
In: SPIE Conference on Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, pp. 113240X, 2020.
High Dynamic Range AFM Cantilever with A Collocated Piezoelectric Actuator-Sensor Pair Journal Article
In: IEEE Journal of Microelectromechanical Systems , vol. 29, no. 21, pp. 260–267, 2020.
SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits Journal Article
In: IEEE Journal of Microelectromechanical Systems, vol. 29, no. 1, pp. 43–53, 2020.
A high dynamic range AFM probe with collocated piezoelectric transducer pairs Inproceedings
In: The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020), 2020.
Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 28, no. 21, pp. 436 - 447, 2020.
2019
Iterative Learning Control for High-Speed Rosette Trajectory Tracking Inproceedings
In: IEEE Conference on Decision and Control , Nice, France, 2019.
A Feedback Controlled MEMS Probe Scanner for On-Chip AFM Inproceedings
In: 8th IFAC Symposium on Mechatronic Systems, Vienna, Austria, 2019.
Scanning Tunneling Microscope Control: A Self-Tuning PI Controller Based on Online Local Barrier Height Estimation Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 27, no. 5, pp. 2004 - 2015, 2019.
Q Control of an Active AFM CantileverWith Differential Sensing Configuration Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 27, no. 5, pp. 2271 - 2278, 2019.
Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array Inproceedings
In: 2019 IEEE Conference on Control Technology and Applications (CCTA), Hong Kong, China, 2019.
A High Bandwidth Microelectromechanical System-Based Nanopositioner for Scanning Tunneling Microscopy Journal Article
In: Review of Scientific Instruments, vol. 90, no. 7, pp. 073706, 2019.
Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design Journal Article
In: Review of Scientific Instruments, vol. 90, pp. 073702 (10pp), 2019.
Characterization of a Tilted-Beam Piezoresistive MEMS Sensor with Current-Drive Readout Circuit Inproceedings
In: American Control Conference, Philadelphia, PA, USA, 2019.
Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy Inproceedings
In: International Conference on Manipulation Automation and Robotics at Small Scales, Helsinki, Finland, 2019.
2018
An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control Journal Article
In: Mechatronics, vol. 56, pp. 198–210, 2018.
Highly parallel scanning tunneling microscope based hydrogen depassivation lithography Journal Article
In: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, vol. 36, no. 6, pp. 06JL05, 2018.
A Connection Between Stability of STM Control System and Local Barrier Height: Implications on Imaging and Lithography Miscellaneous
Presented at the AVS 65th International Symposium & Exhibition, Long Beach, CA, Oct 21-26, 2018, 2018, (Invited Paper).
A novel non-raster scan method for AFM imaging Inproceedings
In: ASME Dynamic Systems and Control Conference, Atlanta, Georgia, 2018.
Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy Inproceedings
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018, Auckland, New Zealand, 2018.
Special Issue on Recent Emerging Technologies in Atomic Force Microscopy Journal Article
In: Asian Journal of Control, vol. 20, no. 4, pp. 1315–-1316, 2018.
Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner Inproceedings
In: AMERICAN CONTROL CONFERENCE, Milwaukee, Wisconsin, 2018.
MEMS in Nanopositioning Inproceedings
In: 16th International Conference on New Actuators, ACTUATOR 2018 , Bremen, Germany, 2018.
Self-tuning PI Control for STM Tip ProtectionTaj Miscellaneous
Presented at the 62nd International Conference on Electron, Ion and Photon Beam Technology \& Nanofabrication, Puerto Rico May 29 – June 1, 2018, 2018.
A novel state transformation approach to tracking of piecewise linear trajectories Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 26, no. 1, pp. 128–138, 2018.
On the effect of local barrier height in scanning tunneling microscopy: Measurement methods and control implications Journal Article
In: Review of Scientific Instruments, vol. 89, no. 1, pp. 013701, 2018.
2017
On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers Journal Article
In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 6, pp. 1287 – 1297, 2017.
The Ian Petersen 60th Birthday Workshop [Conference Reports] Journal Article
In: Control Systems Magazine, vol. 37, no. 5, pp. 93–94, 2017.
A Self-Tuning Controller for High-Performance Scanning Tunneling Microscopy Inproceedings
In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.
Q Control of a Microfabricated Piezoelectric Cantilever with On-Chip Feedthrough Cancellation Inproceedings
In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.
Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control Inproceedings
In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.
A Closed-Loop MEMS Force Sensor with Adjustable Stiffness Inproceedings
In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.
MEMS for Nanopositioning: Design and Applications Journal Article
In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 3, pp. 469–500, 2017.