Publications

440 entries « 1 of 9 »

2024

R. Mishra; S. O. R. Moheimani

Kalman Filter-Based Estimation of Surface Conductivity and Surface Variations in Scanning Tunneling Microscopy Journal Article

IEEE Transactions for Control Systems Technology, 2024, (Accepted for publication).

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H. Alemansour; S. O. R. Moheimani

Model-based Control of the Scanning Tunneling Microscope: Enabling New Modes of Imaging, Spectroscopy, and Lithography Journal Article

IEEE Control Systems Magazine, 44 (1), pp. 46 – 66, 2024.

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K. Shi; N. Nikooienejad; I. R. Petersen; S. O. R. Moheimani

Negative Imaginary Control Using Hybrid Integrator-Gain Systems: Application to MEMS Nanopositioner Journal Article

IEEE Transactions on Control Systems Technology, 2024, (Accepted for publication).

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2023

D. Dadkhah; S. O. R. Moheimani

Combining H∞ and Resonant Control to Enable High-bandwidth Force Measurements with a MEMS Sensor Journal Article

Mechatronics, 96 (103086), pp. 9pp, 2023.

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K. S. Vikrant; H. M. Nasrabadi; S. O. R. Moheimani

A Novel Actuator Based on Near-Field Acoustic Levitation and Electromagnetic Actuation Inproceedings

Proc. 2023 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), 2023.

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R. Mishra; S. O. R. Moheimani

Kalman Filter Estimation Technique for Surface Conductivity in STM Inproceedings

Proc. Modeling, Estimation and Control Conference 2023, Lake Tahoe, 2023.

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AFM Microcantilever with On-chip Electrothermal and Piezoelectric Transducers: Z-axis Control and Standalone Operation

H. M. Nasrabadi; N. Nikooienejad; K. S. Vikrant; S. O. R. Moheimani

AFM Microcantilever with On-chip Electrothermal and Piezoelectric Transducers: Z-axis Control and Standalone Operation Inproceedings

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp. 94–98, Seattle, WA, 2023.

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D. Dadkhah; S. O. R. Moheimani

A high-bandwidth closed-loop MEMS force sensor with system dynamics adjustment Inproceedings

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp. 79–84, Seattle, WA, 2023.

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E. Fuchs; J. H. G. Owen; A. Alipour; E. Fowler; S. O. R. Moheimani; J. N. Randall

Scalable digital atomic precision lithography Inproceedings

Proc. SPIE Conference on Novel Patterning Technologies 2023, San Jose, CA, 2023.

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M. B. Coskun; M. Soleymaniha; M. Mahdavi; S. O. R. Moheimani

Active Microcantilevers for Dynamic Mode Atomic Force Microscopy Journal Article

Encyclopedia of Sensors and Biosensors: Volume 1-4, First Edition , 3 , pp. 617–642, 2023.

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2022

K. Shi; N. Nikooienejad; I. R. Petersen; S. O. R. Moheimani

A Negative Imaginary Approach to Hybrid Integrator-Gain System Control Inproceedings

Proc. IEEE Conference on Decision and Control (CDC), Cancun, Mexico, 2022.

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H. M. Nasrabadi; N. Nikooienejad; S. O. R. Moheimani

Combining Electrothermal Actuation with Piezoelectric Actuation and Sensing in a Dynamic Mode AFM Microcantilever Inproceedings

Proc. 2022 IEEE Sensors, Dallas, TX, 2022.

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E. Khodabakhshi; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Design and Characterization of a Novel High-bandwidth Flexure-guided XY Nanopositioner Inproceedings

Proc. 9th IFAC Symposium on Mechatronic Systems, Los Angeles, CA, 2022.

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R. Mishra; N. Nikooienejad; S. O. R. Moheimani; I. R. Petersen

Kalman Filter Based Estimation of Surface Conductivity in STM Inproceedings

Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA), pp. 950-955, Trieste, Italy, 2022.

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E. Khodabakhshi; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner Inproceedings

Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA), pp. 1313-1318, Trieste, Italy, 2022.

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H. M. Nasrabadi; M. Mahdavi; M. Soleymaniha; S. O. R. Moheimani

High resolution atomic force microscopy with an active piezoelectric microcantilever Journal Article

Review of Scientific Instruments, 93 , pp. 073706, 2022.

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A. Alipour; E. Fowler; S. O. R. Moheimani; J. H. G. Owen; J. N. Randall

Atomic-resolution lithography with an on-chip scanning tunneling microscope Journal Article

Journal of Vacuum Science & Technology B , 40 , pp. 030603 (5pp), 2022.

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N. Nikooienejad; S. O. R. Moheimani

Convex Synthesis of SNI Controllers Based on Frequency-Domain Data: MEMS Nanopositioner Example Journal Article

IEEE Transactions on Control Systems Technology, 30 (2 ), pp. 767-778, 2022.

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H. M. Nasrabadi; M. Mahdavi; S. O. R. Moheimani

Q Control of an AFM Microcantilever with Double-Stack AlN Sensors and Actuators Journal Article

IEEE Sensors Journal, 22 (5), pp. 3957-3964, 2022.

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2021

N. Nikooienejad; S. O. R. Moheimani

Frequency Domain-Based Integral Resonant Controller Design for a MEMS Nanopositioner Inproceedings

IEEE Conference on Control Technology and Applications, San Diego, CA, 2021.

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A. Alipour; S. O. R. Moheimani; J. H. G. Owen; E. Fuchs; J. N. Randall

Atomic precision imaging with an on-chip STM integrated into a commercial UHV STM system Journal Article

Journal of Vacuum Science & Technology B , 39 (4), 2021.

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H. Alemansour; S. O. R. Moheimani; J. H. G. Owen; J. N. Randall; E. Fuchs

An ultra-fast method for scanning tunneling spectroscopy Journal Article

Journal of Vacuum Science & Technology B , 39 (4), 2021.

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V. Visalakshi; S. Share; S. O. R. Moheimani; B. Bhikkaji

Design of Positive Position Feedback Controllers for Collocated Systems Inproceedings

Proc. American Control Conference, pp. 4791–4796, New Orleans, LA, 2021.

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A. Alipour; M. B. Coskun; S. O. R. Moheimani

A MEMS nanopositioner with integrated tip for scanning tunneling microscopy Journal Article

IEEE Journal of Microelectromechanical Systems , 30 (2 ), pp. 271 – 280, 2021.

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M. Mahdavi; H. M. Nasrabadi; M. Soleymaniha; S. O. R. Moheimani

Modal Actuation and Sensing with an Active AFM Cantilever Journal Article

IEEE Sensors Journal, 21 (7), pp. 8950–8959, 2021.

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M. Soleymaniha; M. B. Coskun; H. M. Nasrabadi; A. Alipour; S. O. R. Moheimani

DESIGN, FABRICATION AND CHARACTERIZATION OF ACTIVE ATOMIC FORCE MICROSCOPE CANTILEVER ARRAYS Inproceedings

The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), 2021.

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H. Alemansour; S. O. R. Moheimani; J. H. G. Owen; E. Fuchs; J. N. Randall

High signal-to-noise ratio differential conductance spectroscopy Journal Article

Journal of Vacuum Science & Technology B , 39 (1), pp. 010601 (5pp), 2021.

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2020

N. Nikooienejad; M. Mahdavi; S. O. R. Moheimani

Q-Controlled Microcantilevers with A Collocated Piezoelectric Actuator-Sensor Pair for Multifrequency AFM Inproceedings

8th Multifrequency AFM Conference, Madrid, Spain, 2020.

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N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Iterative Learning Control for Video-rate Atomic Force Microscopy Journal Article

IEEE/ASME Transactions on Mechatronics, 26 (4), pp. 2127 - 2138, 2020.

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M. Mahdavi; N. Nikooienejad; S. O. R. Moheimani

AFM microcantilever with a collocated AlN sensor-actuator pair: enabling efficient Q-control for dynamic imaging Journal Article

IEEE Journal of Microelectromechanical Systems, 29 (5), pp. 661 - 668, 2020.

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H. Alemansour; S. O. R. Moheimani; J. H. G. Owen; J. N. Randall; E. Fuchs

Controlled removal of hydrogen atoms from H-terminated silicon surfaces Journal Article

Journal of Vacuum Science & Technology B , 38 (4), pp. 040601, 2020.

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O. Kaveh; M. B. Coskun; M. Mahdavi; S. O. R. Moheimani

FPGA-Based Characterization and Q-Control of an Active AFM Cantilever Inproceedings

2020 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), Boston, MA, USA, 2020.

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M. Maroufi; H. Alemansour; S. O. R. Moheimani

A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor Journal Article

IEEE Journal of Microelectromechanical Systems, 29 (3), pp. 397 - 407, 2020.

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S. O. R. Moheimani; H. Alemansour

A new approach to removing H atoms in hydrogen depassivation lithography Inproceedings

SPIE Conference on Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, pp. 113240Y, 2020.

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J. N. Randall; J. H. G. Owen; E. Fuchs; R. Saini; R. Santini; S. O. R. Moheimani

Atomically precise digital e-beam lithography Inproceedings

SPIE Conference on Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, pp. 113240X, 2020.

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M. Mahdavi; M. B. Coskun; S. O. R. Moheimani

High Dynamic Range AFM Cantilever with A Collocated Piezoelectric Actuator-Sensor Pair Journal Article

IEEE Journal of Microelectromechanical Systems , 29 (21), pp. 260–267, 2020.

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M. Maroufi; N. Nikooienejad; M. Mahdavi; S. O. R. Moheimani

SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits Journal Article

IEEE Journal of Microelectromechanical Systems, 29 (1), pp. 43–53, 2020.

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M. Mahdavi; M. B. Coskun; H. M. Nasrabadi; S. O. R. Moheimani

A high dynamic range AFM probe with collocated piezoelectric transducer pairs Inproceedings

The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020), 2020.

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N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani

Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory Journal Article

IEEE Transactions on Control Systems Technology, 28 (21), pp. 436 - 447, 2020.

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2019

N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Iterative Learning Control for High-Speed Rosette Trajectory Tracking Inproceedings

IEEE Conference on Decision and Control , Nice, France, 2019.

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H. Alemansour; M. Maroufi; A. Alipour; S. O. R. Moheimani

A Feedback Controlled MEMS Probe Scanner for On-Chip AFM Inproceedings

8th IFAC Symposium on Mechatronic Systems, Vienna, Austria, 2019.

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F. Tajaddodianfar; S. O. R. Moheimani; J. N. Randall

Scanning Tunneling Microscope Control: A Self-Tuning PI Controller Based on Online Local Barrier Height Estimation Journal Article

IEEE Transactions on Control Systems Technology, 27 (5), pp. 2004 - 2015, 2019.

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M. B. Coskun; H. Alemansour; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

Q Control of an Active AFM CantileverWith Differential Sensing Configuration Journal Article

IEEE Transactions on Control Systems Technology, 27 (5), pp. 2271 - 2278, 2019.

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M. B. Coskun; M. Baan; A. Alipour; S. O. R. Moheimani

Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array Inproceedings

2019 IEEE Conference on Control Technology and Applications (CCTA), Hong Kong, China, 2019.

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A. Alipour; M. B. Coskun; S. O. R. Moheimani

A High Bandwidth Microelectromechanical System-Based Nanopositioner for Scanning Tunneling Microscopy Journal Article

Review of Scientific Instruments, 90 (7), pp. 073706, 2019.

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N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design Journal Article

Review of Scientific Instruments, 90 , pp. 073702 (10pp), 2019.

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N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Characterization of a Tilted-Beam Piezoresistive MEMS Sensor with Current-Drive Readout Circuit Inproceedings

American Control Conference, Philadelphia, PA, USA, 2019.

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M. Maroufi; A. Alipour; H. Alemansour; S. O. R. Moheimani

Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy Inproceedings

International Conference on Manipulation Automation and Robotics at Small Scales, Helsinki, Finland, 2019.

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2018

M. Maroufi; H. Alemansour; M. B. Coskun; S. O. R. Moheimani

An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control Journal Article

Mechatronics, 56 , pp. 198–210, 2018.

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J. N. Randall; J. Owen; J. Lake; R. Saini; E. Fuchs; M. Mahdavi; S. O. R. Moheimani; B. Carrion-Schaefer

Highly parallel scanning tunneling microscope based hydrogen depassivation lithography Journal Article

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 36 (6), pp. 06JL05, 2018.

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440 entries « 1 of 9 »