Publications

443 entries « 2 of 9 »

2019

M. Maroufi; A. Alipour; H. Alemansour; S. O. R. Moheimani

Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy Inproceedings

International Conference on Manipulation Automation and Robotics at Small Scales, Helsinki, Finland, 2019.

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2018

M. Maroufi; H. Alemansour; M. B. Coskun; S. O. R. Moheimani

An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control Journal Article

Mechatronics, 56 , pp. 198–210, 2018.

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J. N. Randall; J. Owen; J. Lake; R. Saini; E. Fuchs; M. Mahdavi; S. O. R. Moheimani; B. Carrion-Schaefer

Highly parallel scanning tunneling microscope based hydrogen depassivation lithography Journal Article

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 36 (6), pp. 06JL05, 2018.

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S. O. R. Moheimani

A Connection Between Stability of STM Control System and Local Barrier Height: Implications on Imaging and Lithography Miscellaneous

Presented at the AVS 65th International Symposium & Exhibition, Long Beach, CA, Oct 21-26, 2018, 2018, (Invited Paper).

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N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

A novel non-raster scan method for AFM imaging Inproceedings

ASME Dynamic Systems and Control Conference, Atlanta, Georgia, 2018.

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N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani

Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy Inproceedings

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018, Auckland, New Zealand, 2018.

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I. R. Petersen; S. O. R. Moheimani

Special Issue on Recent Emerging Technologies in Atomic Force Microscopy Journal Article

Asian Journal of Control, 20 (4), pp. 1315–-1316, 2018.

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A. Alipour; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner Inproceedings

AMERICAN CONTROL CONFERENCE, Milwaukee, Wisconsin, 2018.

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M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS in Nanopositioning Inproceedings

16th International Conference on New Actuators, ACTUATOR 2018 , Bremen, Germany, 2018.

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F. Tajaddodianfar; S. O. R. Moheimani; J. Owen; J. Ballard; E. Fuchs; J. N. Randall

Self-tuning PI Control for STM Tip ProtectionTaj Miscellaneous

Presented at the 62nd International Conference on Electron, Ion and Photon Beam Technology \& Nanofabrication, Puerto Rico May 29 – June 1, 2018, 2018.

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A. Bazaei; Z. Chen; Y. K. Yong; S. O. R. Moheimani

A novel state transformation approach to tracking of piecewise linear trajectories Journal Article

IEEE Transactions on Control Systems Technology, 26 (1), pp. 128–138, 2018.

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F. Tajaddodianfar; S. O. R. Moheimani; J. Owen; J. N. Randall

On the effect of local barrier height in scanning tunneling microscopy: Measurement methods and control implications Journal Article

Review of Scientific Instruments, 89 (1), pp. 013701, 2018.

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2017

M. B. Coskun; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers Journal Article

IEEE Journal of Microelectromechanical Systems, 26 (6), pp. 1287 – 1297, 2017.

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D. Dong; S. O. R. Moheimani; V. Ugrinovskii

The Ian Petersen 60th Birthday Workshop [Conference Reports] Journal Article

Control Systems Magazine, 37 (5), pp. 93–94, 2017.

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F. Tajaddodianfar; S. O. R. Moheimani; J. Owen; J. N. Randall

A Self-Tuning Controller for High-Performance Scanning Tunneling Microscopy Inproceedings

IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

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A. G. Fowler; M. B. Coskun; S. O. R. Moheimani

Q Control of a Microfabricated Piezoelectric Cantilever with On-Chip Feedthrough Cancellation Inproceedings

IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

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A. Bazaei; M. Maroufi; S. O. R. Moheimani

Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control Inproceedings

IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

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M. Maroufi; H. Alemansour; S. O. R. Moheimani

A Closed-Loop MEMS Force Sensor with Adjustable Stiffness Inproceedings

IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

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M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS for Nanopositioning: Design and Applications Journal Article

IEEE Journal of Microelectromechanical Systems, 26 (3), pp. 469–500, 2017.

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M. G. Ruppert; M. Maroufi; A. Bazaei; S. O. R. Moheimani

Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner Inproceedings

20th IFAC World Congress, Toulouse, France, 2017.

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A. Bazaei; M. Maroufi; S. O. R. Moheimani

Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method Inproceedings

20th IFAC World Congress, Toulouse, France, 2017.

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M. G. Ruppert; D. M. Harcombe; M. R. P. Ragazzon; S. O. R. Moheimani; A. J. Fleming

A Review of Demodulation Techniques for Amplitude Modulation Atomic Force Microscopy Journal Article

Beilstein Journal of Nanotechnology, 8 , pp. 1407–1426, 2017.

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M. Maroufi; M. G. Ruppert; A. G. Fowler; S. O. R. Moheimani

Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope Inproceedings

American Control Conference, Seattle, WA, USA, 2017.

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F. Tajaddodianfar; S. O. R. Moheimani; E. Fuchs; J. N. Randall

Stability Analysis of a Scanning Tunneling Microscope Control System Inproceedings

American Control Conference, Seattle, WA, USA, 2017.

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M. G. Ruppert; D. M. Harcombe; M. R. P. Ragazzon; S. O. R. Moheimani; A. J. Fleming

Frequency Domain Analysis of Robust Demodulators for High-Speed Atomic Force Microscopy Inproceedings

American Control Conference, Washington, Seattle, USA, 2017.

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M. Maroufi; S. O. R. Moheimani

An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors Journal Article

IEEE Sensors Journal, 17 (10), pp. 3030–3040, 2017.

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S. I. Moore; Y. K. Yong; S. O. R. Moheimani

Switched Self-Sensing Actuator for a MEMS Nanopositioner Inproceedings

IEEE-ICM International Conference on Mechatronics, Gippsland, Australia, 2017.

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A. Bazaei; Y. K. Yong; S. O. R. Moheimani

Combining Spiral Scanning and Internal Model Control for Sequential AFM Imaging at Video Rate Journal Article

IEEE/ASME Transactions on Mechatronics, 22 (1), pp. 371–380, 2017.

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M. G. Ruppert; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach Journal Article

IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215 - 225, 2017.

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2016

A. G. Fowler; S. O. R. Moheimani

A 4-DOF MEMS Energy Harvester Using Ultrasonic Excitation Journal Article

IEEE Sensors Journal, 16 (21), pp. 7774–7783, 2016.

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M. Maroufi; S. O. R. Moheimani

Characterization of piezoresistive and electrothermal sensors in MEMS devices Inproceedings

IEEE Sensors Conference, Orlando, FL., USA, 2016.

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A. Bazaei; M. Maroufi; A. G. Fowler; S. O. R. Moheimani

Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners Journal Article

IEEE Transactions on Control Systems Technology, 24 (5), pp. 1717–1728, 2016.

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S. I. Moore; S. O. R. Moheimani

A switched actuation and sensing method for a MEMS electrostatic drive Inproceedings

Proc. 2016 American Control Conference, 2016.

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M. Grover; C. Wagner; M. Maiworm; R. Temilov; S. Tautz; M. V. Salapaka; S. M. Salapaka; R. D. Braatz; S. O. R. Moheimani

Control on a Molecular Scale: a Perspective Inproceedings

Proc. 2016 American Control Conference, 2016.

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M. G. Ruppert; D. M. Harcombe; S. O. R. Moheimani

State Estimation for High-Speed Multifrequency Atomic Force Microscopy Inproceedings

Proc. 2016 American Control Conference, Boston, MA, 2016.

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M. G. Ruppert; S. O. R. Moheimani

Multimode Q Control in Tapping-Mode AFM: Enabling Imaging on Higher Flexural Eigenmodes Journal Article

IEEE Transactions on Control Systems Technology, 24 (4), pp. 1149–1159, 2016.

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F. Tajaddodianfar; A. G. Fowler; S. O. R. Moheimani; E. Fuchs; J. N. Randall

Frequency-Domain Closed-Loop System Identification of a Scanning Tunneling Microscope Inproceedings

Proc. 2016 ASPE Spring Topical Meeting Precision Mechatronic System Design and Control, Boston, MA, 2016.

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M. Maroufi; S. O. R. Moheimani

A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors Journal Article

IEEE Sensors Journal, 16 (7), pp. 1908–1917, 2016.

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M. G. Ruppert; D. M. Harcombe; S. O. R. Moheimani

High-Bandwidth Demodulation in Multifrequency AFM: A Kalman Filtering Approach Journal Article

IEEE/ASME Transactions on Mechatronics, 2016, (Accepted for Publication).

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M. G. Ruppert; S. O. R. Moheimani

High-bandwidth multimode self-sensing in bimodal atomic force microscopy Journal Article

Beilstein Journal of Nanotechnology, 7 (287--295), pp. 284–295, 2016, ISBN: :10.3762/bjnano.7.26.

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A. Bazaei; M. Maroufi; S. O. R. Moheimani

On the modeling of tilted fixed-guided flexible beams under tension Journal Article

Acta Mechanica, 227 (2), pp. 333–352, 2016.

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Y. Zhu; S. O. R. Moheimani; M. R. Yuce; A. Bazaei

Control Issues of MEMS Nanopositioning Devices Book Chapter

C. Ru; X. Liu; Y. Sun (Ed.): Nanopositioning Technologies: Fundamentals and Applications, 2016.

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M. G. Ruppert; K. S. Karvinen; S. Wiggins; S. O. R. Moheimani

A Kalman Filter for Amplitude Estimation in High-Speed Dynamic Mode Atomic Force Microscopy Journal Article

IEEE Transactions on Control Systems Technology, 24 (1), pp. 276–284, 2016.

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2015

M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design Journal Article

IEEE Journal of Microelectromechanical Systems, 24 (6), pp. 1730–1740, 2015.

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A. Bazaei; Y. K. Yong; S. O. R. Moheimani

Internal Model Control for High-Speed Spiral Scan AFM Inproceedings

Australian Control Conference, Gold Coast, Queensland, Australia, 2015.

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M. Maroufi; S. O. R. Moheimani

Cross coupling in parallel kinematic MEMS nanopositioners Inproceedings

ASME Conference on Dynamic Systems and Control, Columbus , Ohio, USA, 2015.

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M. Maroufi; A. Bazaei; A. Mohammadi; S. O. R. Moheimani

Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization Journal Article

IEEE Journal of Microelectromechanical Systems, 24 (5), pp. 1594–1604, 2015.

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A. Bazaei; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner Inproceedings

IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.

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M. Maroufi; Y. K. Yong; S. O. R. Moheimani

Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors Inproceedings

IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.

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M. G. Ruppert; S. O. R. Moheimani

Multi-Mode Q Control in Multifrequency Atomic Force Microscopy Inproceedings

ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference , Boston, Massachusetts, USA, 2015.

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443 entries « 2 of 9 »