Journal Articles
|
| D. Dadkhah; S. O. R. Moheimani Combining H∞ and Resonant Control to Enable High-bandwidth Force Measurements with a MEMS Sensor Mechatronics Journal Article Mechatronics, 2023, (Accepted for publication subject to minor revision). BibTeX @article{J23c,
title = {Combining H∞ and Resonant Control to Enable High-bandwidth Force Measurements with a MEMS Sensor Mechatronics},
author = {D. Dadkhah and S. O. R. Moheimani},
year = {2023},
date = {2023-09-07},
journal = {Mechatronics},
note = {Accepted for publication subject to minor revision},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| H. Alemansour; S. O. R. Moheimani Model-based Control of the Scanning Tunneling Microscope: Enabling New Modes of Imaging, Spectroscopy, and Lithography Journal Article IEEE Control Systems Magazine, 2023, (Accepted for publication). BibTeX @article{J23a,
title = {Model-based Control of the Scanning Tunneling Microscope: Enabling New Modes of Imaging, Spectroscopy, and Lithography},
author = {H. Alemansour and S. O. R. Moheimani},
year = {2023},
date = {2023-08-01},
journal = {IEEE Control Systems Magazine},
note = {Accepted for publication},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. B. Coskun; M. Soleymaniha; M. Mahdavi; S. O. R. Moheimani Active Microcantilevers for Dynamic Mode Atomic Force Microscopy Journal Article Encyclopedia of Sensors and Biosensors: Volume 1-4, First Edition , 3 , pp. 617–642, 2023. BibTeX | Links:  @article{J23b,
title = {Active Microcantilevers for Dynamic Mode Atomic Force Microscopy},
author = {M. B. Coskun and M. Soleymaniha and M. Mahdavi and S. O. R. Moheimani},
doi = {http://dx.doi.org/10.1016/B978-0-12-822548-6.00076-5},
year = {2023},
date = {2023-01-01},
journal = { Encyclopedia of Sensors and Biosensors: Volume 1-4, First Edition },
volume = {3},
pages = {617--642},
publisher = {Elsevier},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| H. M. Nasrabadi; M. Mahdavi; M. Soleymaniha; S. O. R. Moheimani High resolution atomic force microscopy with an active piezoelectric microcantilever Journal Article Review of Scientific Instruments, 93 , pp. 073706, 2022. BibTeX | Links: @article{J22d,
title = {High resolution atomic force microscopy with an active piezoelectric microcantilever},
author = {H. M. Nasrabadi and M. Mahdavi and M. Soleymaniha and S. O. R. Moheimani },
doi = {https://doi.org/10.1063/5.0090668},
year = {2022},
date = {2022-07-15},
journal = {Review of Scientific Instruments},
volume = {93},
pages = { 073706},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Alipour; E. Fowler; S. O. R. Moheimani; J. H. G. Owen; J. N. Randall Atomic-resolution lithography with an on-chip scanning tunneling microscope Journal Article Journal of Vacuum Science & Technology B , 40 , pp. 030603 (5pp), 2022. BibTeX | Links:  @article{J22c,
title = {Atomic-resolution lithography with an on-chip scanning tunneling microscope},
author = {A. Alipour and E. Fowler and S. O. R. Moheimani and J. H. G. Owen and J. N. Randall},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/JVB22-LE-00050-1.pdf},
year = {2022},
date = {2022-04-25},
urldate = {2022-04-25},
journal = {Journal of Vacuum Science & Technology B },
volume = {40},
pages = {030603 (5pp)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| N. Nikooienejad; S. O. R. Moheimani Convex Synthesis of SNI Controllers Based on Frequency-Domain Data: MEMS Nanopositioner Example Journal Article IEEE Transactions on Control Systems Technology, 30 (2 ), pp. 767-778, 2022. BibTeX | Links: @article{J22a,
title = {Convex Synthesis of SNI Controllers Based on Frequency-Domain Data: MEMS Nanopositioner Example},
author = {N. Nikooienejad and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/Convex_Synthesis_of_SNI_Controllers_Based_on_Frequency-Domain_Data_MEMS_Nanopositioner_Example.pdf},
doi = {10.1109/TCST.2021.3080577},
year = {2022},
date = {2022-03-01},
urldate = {2022-03-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {30},
number = {2 },
pages = {767-778},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| H. M. Nasrabadi; M. Mahdavi; S. O. R. Moheimani Q Control of an AFM Microcantilever with Double-Stack AlN Sensors and Actuators Journal Article IEEE Sensors Journal, 22 (5), pp. 3957-3964, 2022. BibTeX | Links: @article{J22b,
title = {Q Control of an AFM Microcantilever with Double-Stack AlN Sensors and Actuators},
author = {H. M. Nasrabadi and M. Mahdavi and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/Q_Control_of_an_AFM_Microcantilever_with_Double-Stack_AlN_Sensors_and_Actuators.pdf},
year = {2022},
date = {2022-01-05},
journal = {IEEE Sensors Journal},
volume = {22},
number = {5},
pages = {3957-3964},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Alipour; S. O. R. Moheimani; J. H. G. Owen; E. Fuchs; J. N. Randall Atomic precision imaging with an on-chip STM integrated into a commercial UHV STM system Journal Article Journal of Vacuum Science & Technology B , 39 (4), 2021. BibTeX | Links: @article{J21g,
title = {Atomic precision imaging with an on-chip STM integrated into a commercial UHV STM system},
author = {A. Alipour and S. O. R. Moheimani and J. H. G. Owen and E. Fuchs and J. N. Randall },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/JVB21-LE-00096.pdf},
doi = {10.1116/6.0001107},
year = {2021},
date = {2021-06-25},
journal = {Journal of Vacuum Science & Technology B },
volume = {39},
number = {4},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| H. Alemansour; S. O. R. Moheimani; J. H. G. Owen; J. N. Randall; E. Fuchs An ultra-fast method for scanning tunneling spectroscopy Journal Article Journal of Vacuum Science & Technology B , 39 (4), 2021. BibTeX | Links: @article{J21f,
title = {An ultra-fast method for scanning tunneling spectroscopy},
author = {H. Alemansour and S. O. R. Moheimani and J. H. G. Owen and J. N. Randall and E. Fuchs },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/JVB21-AR-00083.pdf},
doi = {10.1116/6.0001087},
year = {2021},
date = {2021-06-23},
journal = {Journal of Vacuum Science & Technology B },
volume = {39},
number = {4},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Alipour; M. B. Coskun; S. O. R. Moheimani A MEMS nanopositioner with integrated tip for scanning tunneling microscopy Journal Article IEEE Journal of Microelectromechanical Systems , 30 (2 ), pp. 271 – 280, 2021. BibTeX | Links: @article{J21c,
title = {A MEMS nanopositioner with integrated tip for scanning tunneling microscopy},
author = {A. Alipour and M. B. Coskun and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/A_MEMS_Nanopositioner_With_Integrated_Tip_for_Scanning_Tunneling_Microscopy.pdf},
doi = {10.1109/JMEMS.2021.3052180},
year = {2021},
date = {2021-04-01},
journal = {IEEE Journal of Microelectromechanical Systems },
volume = {30},
number = {2 },
pages = {271 -- 280},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Mahdavi; H. M. Nasrabadi; M. Soleymaniha; S. O. R. Moheimani Modal Actuation and Sensing with an Active AFM Cantilever Journal Article IEEE Sensors Journal, 21 (7), pp. 8950–8959, 2021. BibTeX | Links: @article{J21d,
title = {Modal Actuation and Sensing with an Active AFM Cantilever},
author = {M. Mahdavi and H. M. Nasrabadi and M. Soleymaniha and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/Modal_Actuation_and_Sensing_With_an_Active_AFM_Cantilever.pdf},
doi = {10.1109/JSEN.2021.3052855},
year = {2021},
date = {2021-04-01},
journal = {IEEE Sensors Journal},
volume = {21},
number = {7},
pages = { 8950--8959},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| H. Alemansour; S. O. R. Moheimani; J. H. G. Owen; E. Fuchs; J. N. Randall High signal-to-noise ratio differential conductance spectroscopy Journal Article Journal of Vacuum Science & Technology B , 39 (1), pp. 010601 (5pp), 2021. BibTeX | Links: @article{J21b,
title = {High signal-to-noise ratio differential conductance spectroscopy },
author = {H. Alemansour and S. O. R. Moheimani and J. H. G. Owen and E. Fuchs and J. N. Randall},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/JVB20-LE-00453-preprint-1.pdf},
doi = {10.1116/6.0000823},
year = {2021},
date = {2021-01-22},
journal = {Journal of Vacuum Science & Technology B },
volume = {39},
number = {1},
pages = {010601 (5pp)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Iterative Learning Control for Video-rate Atomic Force Microscopy Journal Article IEEE/ASME Transactions on Mechatronics, 26 (4), pp. 2127 - 2138, 2020. BibTeX | Links: @article{J20g,
title = {Iterative Learning Control for Video-rate Atomic Force Microscopy},
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/TMECH3032565-1.pdf},
doi = {10.1109/TMECH.2020.3032565},
year = {2020},
date = {2020-08-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {26},
number = {4},
pages = {2127 - 2138},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Mahdavi; N. Nikooienejad; S. O. R. Moheimani AFM microcantilever with a collocated AlN sensor-actuator pair: enabling efficient Q-control for dynamic imaging Journal Article IEEE Journal of Microelectromechanical Systems, 29 (5), pp. 661 - 668, 2020. BibTeX | Links: @article{J20d,
title = {AFM microcantilever with a collocated AlN sensor-actuator pair: enabling efficient Q-control for dynamic imaging},
author = {M. Mahdavi and N. Nikooienejad and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/AFM_Microcantilever_With_a_Collocated_AlN_Sensor-Actuator_Pair_Enabling_Efficient_Q-Control_for_Dynamic_Imaging.pdf},
doi = {10.1109/JMEMS.2020.3011826},
year = {2020},
date = {2020-07-31},
booktitle = {Hilton Head Solid-State Sensors, Actuators and Microsystems Workshop},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {29},
number = {5},
pages = {661 - 668},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| H. Alemansour; S. O. R. Moheimani; J. H. G. Owen; J. N. Randall; E. Fuchs Controlled removal of hydrogen atoms from H-terminated silicon surfaces Journal Article Journal of Vacuum Science & Technology B , 38 (4), pp. 040601, 2020. BibTeX | Links: @article{J20e,
title = {Controlled removal of hydrogen atoms from H-terminated silicon surfaces},
author = {H. Alemansour and S. O. R. Moheimani and J. H. G. Owen and J. N. Randall and E. Fuchs },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/JVB20-LE-00180-preprint.pdf},
year = {2020},
date = {2020-07-28},
journal = {Journal of Vacuum Science & Technology B },
volume = {38},
number = {4},
pages = {040601},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; H. Alemansour; S. O. R. Moheimani A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor Journal Article IEEE Journal of Microelectromechanical Systems, 29 (3), pp. 397 - 407, 2020. BibTeX | Links: @article{J20f,
title = {A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor},
author = {M. Maroufi and H. Alemansour and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/A_High_Dynamic_Range_Closed-Loop_Stiffness-Adjustable_MEMS_Force_Sensor.pdf},
doi = {10.1109/JMEMS.2020.2983193},
year = {2020},
date = {2020-06-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {29},
number = {3},
pages = {397 - 407},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Mahdavi; M. B. Coskun; S. O. R. Moheimani High Dynamic Range AFM Cantilever with A Collocated Piezoelectric Actuator-Sensor Pair Journal Article IEEE Journal of Microelectromechanical Systems , 29 (21), pp. 260–267, 2020. BibTeX | Links: @article{J20c,
title = {High Dynamic Range AFM Cantilever with A Collocated Piezoelectric Actuator-Sensor Pair},
author = {M. Mahdavi and M. B. Coskun and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/High_Dynamic_Range_AFM_Cantilever_With_a_Collocated_Piezoelectric_Actuator-Sensor_Pair-1.pdf},
doi = {10.1109/JMEMS.2020.2967794},
year = {2020},
date = {2020-02-02},
journal = {IEEE Journal of Microelectromechanical Systems },
volume = {29},
number = {21},
pages = {260--267},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; N. Nikooienejad; M. Mahdavi; S. O. R. Moheimani SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits Journal Article IEEE Journal of Microelectromechanical Systems, 29 (1), pp. 43–53, 2020. BibTeX | Links: @article{J20a,
title = {SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits},
author = {M. Maroufi and N. Nikooienejad and M. Mahdavi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08937788.pdf},
doi = {10.1109/JMEMS.2019.2952547},
year = {2020},
date = {2020-02-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {29},
number = {1},
pages = {43--53},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory Journal Article IEEE Transactions on Control Systems Technology, 28 (21), pp. 436 - 447, 2020. BibTeX | Links: @article{J20b,
title = {Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory},
author = {N. Nikooienejad and A. Alipour and M. Maroufi and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08575120.pdf},
doi = {10.1109/TCST.2018.2879939},
year = {2020},
date = {2020-01-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {28},
number = {21},
pages = {436 - 447},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| F. Tajaddodianfar; S. O. R. Moheimani; J. N. Randall Scanning Tunneling Microscope Control: A Self-Tuning PI Controller Based on Online Local Barrier Height Estimation Journal Article IEEE Transactions on Control Systems Technology, 27 (5), pp. 2004 - 2015, 2019. BibTeX | Links: @article{J19b,
title = {Scanning Tunneling Microscope Control: A Self-Tuning PI Controller Based on Online Local Barrier Height Estimation},
author = {F. Tajaddodianfar and S. O. R. Moheimani and J. N. Randall},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08399525-1.pdf},
doi = {10.1109/TCST.2018.2844781},
year = {2019},
date = {2019-09-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {27},
number = {5},
pages = {2004 - 2015},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. B. Coskun; H. Alemansour; A. G. Fowler; M. Maroufi; S. O. R. Moheimani Q Control of an Active AFM CantileverWith Differential Sensing Configuration Journal Article IEEE Transactions on Control Systems Technology, 27 (5), pp. 2271 - 2278, 2019. BibTeX | Links: @article{J17a,
title = {Q Control of an Active AFM CantileverWith Differential Sensing Configuration},
author = {M. B. Coskun and H. Alemansour and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08410617.pdf},
doi = {10.1109/TCST.2018.2850338},
year = {2019},
date = {2019-09-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {27},
number = {5},
pages = { 2271 - 2278},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Alipour; M. B. Coskun; S. O. R. Moheimani A High Bandwidth Microelectromechanical System-Based Nanopositioner for Scanning Tunneling Microscopy Journal Article Review of Scientific Instruments, 90 (7), pp. 073706, 2019. BibTeX | Links: @article{J19e,
title = {A High Bandwidth Microelectromechanical System-Based Nanopositioner for Scanning Tunneling Microscopy},
author = {A. Alipour and M. B. Coskun and S. O. R. Moheimani },
doi = {doi:10.1063/1.5109900},
year = {2019},
date = {2019-07-31},
journal = {Review of Scientific Instruments},
volume = {90},
number = {7},
pages = {073706},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design Journal Article Review of Scientific Instruments, 90 , pp. 073702 (10pp), 2019. BibTeX | Links: @article{J19d,
title = {Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design},
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/1.5098499.pdf},
doi = {10.1063/1.5098499},
year = {2019},
date = {2019-07-10},
journal = {Review of Scientific Instruments},
volume = {90},
pages = {073702 (10pp)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; H. Alemansour; M. B. Coskun; S. O. R. Moheimani An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control Journal Article Mechatronics, 56 , pp. 198–210, 2018. BibTeX | Links: @article{J18c,
title = {An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control},
author = {M. Maroufi and H. Alemansour and M. B. Coskun and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/1-s2.0-S095741581830076X-main.pdf},
year = {2018},
date = {2018-12-03},
journal = {Mechatronics},
volume = {56},
pages = {198--210},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| J. N. Randall; J. Owen; J. Lake; R. Saini; E. Fuchs; M. Mahdavi; S. O. R. Moheimani; B. Carrion-Schaefer Highly parallel scanning tunneling microscope based hydrogen depassivation lithography Journal Article Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 36 (6), pp. 06JL05, 2018. BibTeX | Links: @article{J18d,
title = {Highly parallel scanning tunneling microscope based hydrogen depassivation lithography},
author = {J. N. Randall and J. Owen and J. Lake and R. Saini and E. Fuchs and M. Mahdavi and S. O. R. Moheimani and B. Carrion-Schaefer},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/1.5047939.pdf},
doi = {10.1116/1.5047939},
year = {2018},
date = {2018-11-29},
journal = {Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics},
volume = {36},
number = {6},
pages = {06JL05},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| I. R. Petersen; S. O. R. Moheimani Special Issue on Recent Emerging Technologies in Atomic Force Microscopy Journal Article Asian Journal of Control, 20 (4), pp. 1315–-1316, 2018. BibTeX | Links: @article{J18i,
title = {Special Issue on Recent Emerging Technologies in Atomic Force Microscopy},
author = {I. R. Petersen and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/Petersen_et_al-2018-Asian_Journal_of_Control-1.pdf},
year = {2018},
date = {2018-07-01},
journal = {Asian Journal of Control},
volume = {20},
number = {4},
pages = {1315–-1316},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
Inproceedings
|
 | H. M. Nasrabadi; N. Nikooienejad; K. S. Vikrant; S. O. R. Moheimani AFM Microcantilever with On-chip Electrothermal and Piezoelectric Transducers: Z-axis Control and Standalone Operation Inproceedings Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp. 94–98, Seattle, WA, 2023. BibTeX @inproceedings{C23a,
title = {AFM Microcantilever with On-chip Electrothermal and Piezoelectric Transducers: Z-axis Control and Standalone Operation},
author = {H. M. Nasrabadi and N. Nikooienejad and K. S. Vikrant and S. O. R. Moheimani},
year = {2023},
date = {2023-06-28},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)},
pages = {94--98},
address = {Seattle, WA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| D. Dadkhah; S. O. R. Moheimani A high-bandwidth closed-loop MEMS force sensor with system dynamics adjustment Inproceedings Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp. 79–84, Seattle, WA, 2023. BibTeX @inproceedings{C23b,
title = {A high-bandwidth closed-loop MEMS force sensor with system dynamics adjustment},
author = {D. Dadkhah and S. O. R. Moheimani},
year = {2023},
date = {2023-06-28},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)},
pages = {79--84},
address = {Seattle, WA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| E. Fuchs; J. H. G. Owen; A. Alipour; E. Fowler; S. O. R. Moheimani; J. N. Randall Scalable digital atomic precision lithography Inproceedings Proc. SPIE Conference on Novel Patterning Technologies 2023, San Jose, CA, 2023. BibTeX @inproceedings{C23c,
title = {Scalable digital atomic precision lithography},
author = {E. Fuchs and J. H. G. Owen and A. Alipour and E. Fowler and S. O. R. Moheimani and J. N. Randall},
year = {2023},
date = {2023-04-30},
booktitle = {Proc. SPIE Conference on Novel Patterning Technologies 2023},
address = {San Jose, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| K. Shi; N. Nikooienejad; I. R. Petersen; S. O. R. Moheimani A Negative Imaginary Approach to Hybrid Integrator-Gain System Control Inproceedings Proc. IEEE Conference on Decision and Control (CDC), Cancun, Mexico, 2022. BibTeX @inproceedings{C22d,
title = {A Negative Imaginary Approach to Hybrid Integrator-Gain System Control},
author = {K. Shi and N. Nikooienejad and I. R. Petersen and S. O. R. Moheimani },
year = {2022},
date = {2022-12-06},
booktitle = {Proc. IEEE Conference on Decision and Control (CDC)},
address = {Cancun, Mexico},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| H. M. Nasrabadi; N. Nikooienejad; S. O. R. Moheimani Combining Electrothermal Actuation with Piezoelectric Actuation and Sensing in a Dynamic Mode AFM Microcantilever Inproceedings Proc. 2022 IEEE Sensors, Dallas, TX, 2022. BibTeX @inproceedings{C22c,
title = {Combining Electrothermal Actuation with Piezoelectric Actuation and Sensing in a Dynamic Mode AFM Microcantilever},
author = {H. M. Nasrabadi and N. Nikooienejad and S. O. R. Moheimani },
year = {2022},
date = {2022-10-30},
booktitle = {Proc. 2022 IEEE Sensors},
address = {Dallas, TX},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| E. Khodabakhshi; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Design and Characterization of a Novel High-bandwidth Flexure-guided XY Nanopositioner Inproceedings Proc. 9th IFAC Symposium on Mechatronic Systems, Los Angeles, CA, 2022. BibTeX @inproceedings{C22e,
title = {Design and Characterization of a Novel High-bandwidth Flexure-guided XY Nanopositioner},
author = {E. Khodabakhshi and N. Nikooienejad and M. Maroufi and S. O. R. Moheimani },
year = {2022},
date = {2022-09-06},
urldate = {2022-09-06},
booktitle = {Proc. 9th IFAC Symposium on Mechatronic Systems},
address = {Los Angeles, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| R. Mishra; N. Nikooienejad; S. O. R. Moheimani; I. R. Petersen Kalman Filter Based Estimation of Surface Conductivity in STM Inproceedings Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA), pp. 950-955, Trieste, Italy, 2022. BibTeX @inproceedings{C22b,
title = {Kalman Filter Based Estimation of Surface Conductivity in STM},
author = {R. Mishra and N. Nikooienejad and S. O. R. Moheimani and I. R. Petersen },
year = {2022},
date = {2022-08-23},
urldate = {2022-08-23},
booktitle = {Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA)},
pages = {950-955},
address = {Trieste, Italy},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| E. Khodabakhshi; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner Inproceedings Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA), pp. 1313-1318, Trieste, Italy, 2022. BibTeX @inproceedings{C22a,
title = {Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner},
author = {E. Khodabakhshi and N. Nikooienejad and M. Maroufi and S. O. R. Moheimani },
year = {2022},
date = {2022-08-03},
urldate = {2022-08-03},
booktitle = {Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA)},
pages = {1313-1318},
address = {Trieste, Italy},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad; S. O. R. Moheimani Frequency Domain-Based Integral Resonant Controller Design for a MEMS Nanopositioner Inproceedings IEEE Conference on Control Technology and Applications, San Diego, CA, 2021. BibTeX @inproceedings{C21b,
title = {Frequency Domain-Based Integral Resonant Controller Design for a MEMS Nanopositioner},
author = {N. Nikooienejad and S. O. R. Moheimani},
year = {2021},
date = {2021-08-09},
booktitle = {IEEE Conference on Control Technology and Applications},
address = {San Diego, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| V. Visalakshi; S. Share; S. O. R. Moheimani; B. Bhikkaji Design of Positive Position Feedback Controllers for Collocated Systems Inproceedings Proc. American Control Conference, pp. 4791–4796, New Orleans, LA, 2021. BibTeX @inproceedings{C21c,
title = {Design of Positive Position Feedback Controllers for Collocated Systems},
author = {V. Visalakshi and S. Share and S. O. R. Moheimani and B. Bhikkaji },
year = {2021},
date = {2021-05-25},
booktitle = {Proc. American Control Conference},
pages = {4791--4796},
address = {New Orleans, LA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Soleymaniha; M. B. Coskun; H. M. Nasrabadi; A. Alipour; S. O. R. Moheimani DESIGN, FABRICATION AND CHARACTERIZATION OF ACTIVE ATOMIC FORCE MICROSCOPE CANTILEVER ARRAYS Inproceedings The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), 2021. BibTeX @inproceedings{C21a,
title = {DESIGN, FABRICATION AND CHARACTERIZATION OF ACTIVE ATOMIC FORCE MICROSCOPE CANTILEVER ARRAYS},
author = {M. Soleymaniha and M. B. Coskun and H. M. Nasrabadi and A. Alipour and S. O. R. Moheimani },
year = {2021},
date = {2021-01-25},
booktitle = {The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad; M. Mahdavi; S. O. R. Moheimani Q-Controlled Microcantilevers with A Collocated Piezoelectric Actuator-Sensor Pair for Multifrequency AFM Inproceedings 8th Multifrequency AFM Conference, Madrid, Spain, 2020. BibTeX @inproceedings{C20b,
title = {Q-Controlled Microcantilevers with A Collocated Piezoelectric Actuator-Sensor Pair for Multifrequency AFM },
author = {N. Nikooienejad and M. Mahdavi and S. O. R. Moheimani },
year = {2020},
date = {2020-10-27},
booktitle = {8th Multifrequency AFM Conference},
address = {Madrid, Spain},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| O. Kaveh; M. B. Coskun; M. Mahdavi; S. O. R. Moheimani FPGA-Based Characterization and Q-Control of an Active AFM Cantilever Inproceedings 2020 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), Boston, MA, USA, 2020. BibTeX | Links: @inproceedings{C20f,
title = {FPGA-Based Characterization and Q-Control of an Active AFM Cantilever},
author = {O. Kaveh and M. B. Coskun and M. Mahdavi and S. O. R. Moheimani},
doi = {10.1109/AIM43001.2020.9158963},
year = {2020},
date = {2020-07-06},
booktitle = {2020 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)},
address = {Boston, MA, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| S. O. R. Moheimani; H. Alemansour A new approach to removing H atoms in hydrogen depassivation lithography Inproceedings SPIE Conference on Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, pp. 113240Y, 2020. BibTeX @inproceedings{C20d,
title = {A new approach to removing H atoms in hydrogen depassivation lithography},
author = {S. O. R. Moheimani and H. Alemansour},
year = {2020},
date = {2020-03-23},
booktitle = {SPIE Conference on Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020},
volume = {11324},
pages = {113240Y},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| J. N. Randall; J. H. G. Owen; E. Fuchs; R. Saini; R. Santini; S. O. R. Moheimani Atomically precise digital e-beam lithography Inproceedings SPIE Conference on Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, pp. 113240X, 2020. BibTeX @inproceedings{C20e,
title = {Atomically precise digital e-beam lithography},
author = {J. N. Randall and J. H. G. Owen and E. Fuchs and R. Saini and R. Santini and S. O. R. Moheimani },
year = {2020},
date = {2020-03-23},
booktitle = {SPIE Conference on Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020},
volume = {11324},
pages = {113240X},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Mahdavi; M. B. Coskun; H. M. Nasrabadi; S. O. R. Moheimani A high dynamic range AFM probe with collocated piezoelectric transducer pairs Inproceedings The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020), 2020. BibTeX @inproceedings{C20a,
title = {A high dynamic range AFM probe with collocated piezoelectric transducer pairs},
author = {M. Mahdavi and M. B. Coskun and H. M. Nasrabadi and S. O. R. Moheimani},
year = {2020},
date = {2020-01-19},
booktitle = {The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Iterative Learning Control for High-Speed Rosette Trajectory Tracking Inproceedings IEEE Conference on Decision and Control , Nice, France, 2019. BibTeX @inproceedings{C19e,
title = {Iterative Learning Control for High-Speed Rosette Trajectory Tracking },
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani},
year = {2019},
date = {2019-12-11},
booktitle = {IEEE Conference on Decision and Control },
address = {Nice, France},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| H. Alemansour; M. Maroufi; A. Alipour; S. O. R. Moheimani A Feedback Controlled MEMS Probe Scanner for On-Chip AFM Inproceedings 8th IFAC Symposium on Mechatronic Systems, Vienna, Austria, 2019. BibTeX @inproceedings{C19c,
title = {A Feedback Controlled MEMS Probe Scanner for On-Chip AFM},
author = {H. Alemansour and M. Maroufi and A. Alipour and S. O. R. Moheimani},
year = {2019},
date = {2019-09-04},
booktitle = {8th IFAC Symposium on Mechatronic Systems},
address = {Vienna, Austria},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. B. Coskun; M. Baan; A. Alipour; S. O. R. Moheimani Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array Inproceedings 2019 IEEE Conference on Control Technology and Applications (CCTA), Hong Kong, China, 2019. BibTeX | Links: @inproceedings{C19d,
title = {Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array},
author = {M. B. Coskun and M. Baan and A. Alipour and S. O. R. Moheimani },
doi = {10.1109/CCTA.2019.8920686},
year = {2019},
date = {2019-08-19},
booktitle = {2019 IEEE Conference on Control Technology and Applications (CCTA)},
address = {Hong Kong, China},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Characterization of a Tilted-Beam Piezoresistive MEMS Sensor with Current-Drive Readout Circuit Inproceedings American Control Conference, Philadelphia, PA, USA, 2019. BibTeX @inproceedings{C19b,
title = {Characterization of a Tilted-Beam Piezoresistive MEMS Sensor with Current-Drive Readout Circuit },
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani },
year = {2019},
date = {2019-07-10},
booktitle = {American Control Conference},
address = {Philadelphia, PA, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi; A. Alipour; H. Alemansour; S. O. R. Moheimani Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy Inproceedings International Conference on Manipulation Automation and Robotics at Small Scales, Helsinki, Finland, 2019. BibTeX | Links: @inproceedings{C19a,
title = {Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy},
author = {M. Maroufi and A. Alipour and H. Alemansour and S. O. R. Moheimani },
doi = {10.1109/MARSS.2019.8860968},
year = {2019},
date = {2019-07-01},
booktitle = {International Conference on Manipulation Automation and Robotics at Small Scales},
address = {Helsinki, Finland},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad; M. Maroufi; S. O. R. Moheimani A novel non-raster scan method for AFM imaging Inproceedings ASME Dynamic Systems and Control Conference, Atlanta, Georgia, 2018. BibTeX @inproceedings{C18d,
title = {A novel non-raster scan method for AFM imaging},
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani},
year = {2018},
date = {2018-09-30},
booktitle = {ASME Dynamic Systems and Control Conference},
address = {Atlanta, Georgia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy Inproceedings IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018, Auckland, New Zealand, 2018. BibTeX @inproceedings{C18b,
title = {Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy},
author = {N. Nikooienejad and A. Alipour and M. Maroufi and S. O. R. Moheimani },
year = {2018},
date = {2018-07-09},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018},
address = {Auckland, New Zealand},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
Miscellaneous
|
| S. O. R. Moheimani A Connection Between Stability of STM Control System and Local Barrier Height: Implications on Imaging and Lithography Miscellaneous Presented at the AVS 65th International Symposium & Exhibition, Long Beach, CA, Oct 21-26, 2018, 2018, (Invited Paper). BibTeX @misc{CA18b,
title = {A Connection Between Stability of STM Control System and Local Barrier Height: Implications on Imaging and Lithography},
author = {S. O. R. Moheimani},
year = {2018},
date = {2018-10-21},
howpublished = {Presented at the AVS 65th International Symposium & Exhibition, Long Beach, CA, Oct 21-26, 2018},
note = {Invited Paper},
keywords = {},
pubstate = {published},
tppubtype = {misc}
}
|
