Dr. Mohammad Maroufi

 


Journal Articles

N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Iterative Learning Control for Video-rate Atomic Force Microscopy Journal Article

In: IEEE/ASME Transactions on Mechatronics, vol. 26, no. 4, pp. 2127 - 2138, 2020.

BibTeX | Links:

M. Maroufi; H. Alemansour; S. O. R. Moheimani

A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 29, no. 3, pp. 397 - 407, 2020.

BibTeX | Links:

M. Maroufi; N. Nikooienejad; M. Mahdavi; S. O. R. Moheimani

SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 29, no. 1, pp. 43–53, 2020.

BibTeX | Links:

N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani

Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 28, no. 21, pp. 436 - 447, 2020.

BibTeX | Links:

M. B. Coskun; H. Alemansour; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

Q Control of an Active AFM CantileverWith Differential Sensing Configuration Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 27, no. 5, pp. 2271 - 2278, 2019.

BibTeX | Links:

N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design Journal Article

In: Review of Scientific Instruments, vol. 90, pp. 073702 (10pp), 2019.

BibTeX | Links:

M. Maroufi; H. Alemansour; M. B. Coskun; S. O. R. Moheimani

An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control Journal Article

In: Mechatronics, vol. 56, pp. 198–210, 2018.

BibTeX | Links:

M. B. Coskun; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 6, pp. 1287 – 1297, 2017.

BibTeX | Links:

M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS for Nanopositioning: Design and Applications Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 3, pp. 469–500, 2017.

BibTeX | Links:

M. Maroufi; S. O. R. Moheimani

An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors Journal Article

In: IEEE Sensors Journal, vol. 17, no. 10, pp. 3030–3040, 2017.

BibTeX | Links:

M. G. Ruppert; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 1, pp. 215 - 225, 2017.

BibTeX | Links:

A. Bazaei; M. Maroufi; A. G. Fowler; S. O. R. Moheimani

Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 24, no. 5, pp. 1717–1728, 2016.

BibTeX | Links:

M. Maroufi; S. O. R. Moheimani

A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors Journal Article

In: IEEE Sensors Journal, vol. 16, no. 7, pp. 1908–1917, 2016.

BibTeX | Links:

A. Bazaei; M. Maroufi; S. O. R. Moheimani

On the modeling of tilted fixed-guided flexible beams under tension Journal Article

In: Acta Mechanica, vol. 227, no. 2, pp. 333–352, 2016.

BibTeX | Links:

M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 24, no. 6, pp. 1730–1740, 2015.

BibTeX | Links:

M. Maroufi; A. Bazaei; A. Mohammadi; S. O. R. Moheimani

Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 24, no. 5, pp. 1594–1604, 2015.

BibTeX | Links:

A. G. Fowler; M. Maroufi; S. O. R. Moheimani

A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy Journal Article

In: Review of Scientific Instruments, vol. 86, no. 4, pp. 046107, 2015.

BibTeX | Links:

M. Maroufi; A. Bazaei; S. O. R. Moheimani

A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 23, no. 2, pp. 504-512, 2015.

BibTeX | Links:

M. Maroufi; A. G. Fowler; A. Bazaei; S. O. R. Moheimani

High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM Journal Article

In: Review of Scientific Instruments, vol. 86, no. 2, pp. 023705 (12pp), 2015.

BibTeX | Links:

A. Bazaei; M. Maroufi; A. Mohammadi; S. O. R. Moheimani

Displacement Sensing with Silicon Flexures in MEMS Nanopositioners Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 23, no. 3, pp. 502–504, 2014.

BibTeX | Links:

Inproceedings

E. Khodabakhshi; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Design and Characterization of a Novel High-bandwidth Flexure-guided XY Nanopositioner Inproceedings

In: Proc. 9th IFAC Symposium on Mechatronic Systems, Los Angeles, CA, 2022.

BibTeX

E. Khodabakhshi; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner Inproceedings

In: Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA), pp. 1313-1318, Trieste, Italy, 2022.

BibTeX

N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Iterative Learning Control for High-Speed Rosette Trajectory Tracking Inproceedings

In: IEEE Conference on Decision and Control , Nice, France, 2019.

BibTeX

H. Alemansour; M. Maroufi; A. Alipour; S. O. R. Moheimani

A Feedback Controlled MEMS Probe Scanner for On-Chip AFM Inproceedings

In: 8th IFAC Symposium on Mechatronic Systems, Vienna, Austria, 2019.

BibTeX

N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Characterization of a Tilted-Beam Piezoresistive MEMS Sensor with Current-Drive Readout Circuit Inproceedings

In: American Control Conference, Philadelphia, PA, USA, 2019.

BibTeX

M. Maroufi; A. Alipour; H. Alemansour; S. O. R. Moheimani

Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy Inproceedings

In: International Conference on Manipulation Automation and Robotics at Small Scales, Helsinki, Finland, 2019.

BibTeX | Links:

N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

A novel non-raster scan method for AFM imaging Inproceedings

In: ASME Dynamic Systems and Control Conference, Atlanta, Georgia, 2018.

BibTeX

N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani

Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy Inproceedings

In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018, Auckland, New Zealand, 2018.

BibTeX

A. Alipour; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani

Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner Inproceedings

In: AMERICAN CONTROL CONFERENCE, Milwaukee, Wisconsin, 2018.

BibTeX

M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS in Nanopositioning Inproceedings

In: 16th International Conference on New Actuators, ACTUATOR 2018 , Bremen, Germany, 2018.

BibTeX

A. Bazaei; M. Maroufi; S. O. R. Moheimani

Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control Inproceedings

In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

BibTeX

M. Maroufi; H. Alemansour; S. O. R. Moheimani

A Closed-Loop MEMS Force Sensor with Adjustable Stiffness Inproceedings

In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

BibTeX

M. G. Ruppert; M. Maroufi; A. Bazaei; S. O. R. Moheimani

Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner Inproceedings

In: 20th IFAC World Congress, Toulouse, France, 2017.

BibTeX

A. Bazaei; M. Maroufi; S. O. R. Moheimani

Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method Inproceedings

In: 20th IFAC World Congress, Toulouse, France, 2017.

BibTeX

M. Maroufi; M. G. Ruppert; A. G. Fowler; S. O. R. Moheimani

Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope Inproceedings

In: American Control Conference, Seattle, WA, USA, 2017.

BibTeX

M. Maroufi; S. O. R. Moheimani

Characterization of piezoresistive and electrothermal sensors in MEMS devices Inproceedings

In: IEEE Sensors Conference, Orlando, FL., USA, 2016.

BibTeX | Links:

M. Maroufi; S. O. R. Moheimani

Cross coupling in parallel kinematic MEMS nanopositioners Inproceedings

In: ASME Conference on Dynamic Systems and Control, Columbus , Ohio, USA, 2015.

BibTeX

A. Bazaei; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner Inproceedings

In: IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.

BibTeX

M. Maroufi; Y. K. Yong; S. O. R. Moheimani

Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors Inproceedings

In: IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.

BibTeX

A. Bazaei; M. Maroufi; S. O. R. Moheimani

Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift Inproceedings

In: Proc. American Control Conference, Chicago, IL, USA, 2015.

BibTeX

A. G. Fowler; M. Maroufi; A. Bazaei; S. O. R. Moheimani

MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy Inproceedings

In: ASME Dynamic Systems and Control Conference, San Antonio, Texas, USA, 2014.

BibTeX

A. Bazaei; M. Maroufi; A. Mohammadi; S. O. R. Moheimani

Development of a MEMS Position Transducer Using Bulk Piezoresistivity of Suspensions Inproceedings

In: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, 2014.

BibTeX

M. Maroufi; S. O. R. Moheimani

Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner Inproceedings

In: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013.

BibTeX