Journal Articles
|
| N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Iterative Learning Control for Video-rate Atomic Force Microscopy Journal Article IEEE/ASME Transactions on Mechatronics, 26 (4), pp. 2127 - 2138, 2020. BibTeX | Links:   @article{J20g,
title = {Iterative Learning Control for Video-rate Atomic Force Microscopy},
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/TMECH3032565-1.pdf},
doi = {10.1109/TMECH.2020.3032565},
year = {2020},
date = {2020-08-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {26},
number = {4},
pages = {2127 - 2138},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; H. Alemansour; S. O. R. Moheimani A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor Journal Article IEEE Journal of Microelectromechanical Systems, 29 (3), pp. 397 - 407, 2020. BibTeX | Links: @article{J20f,
title = {A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor},
author = {M. Maroufi and H. Alemansour and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/A_High_Dynamic_Range_Closed-Loop_Stiffness-Adjustable_MEMS_Force_Sensor.pdf},
doi = {10.1109/JMEMS.2020.2983193},
year = {2020},
date = {2020-06-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {29},
number = {3},
pages = {397 - 407},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; N. Nikooienejad; M. Mahdavi; S. O. R. Moheimani SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits Journal Article IEEE Journal of Microelectromechanical Systems, 29 (1), pp. 43–53, 2020. BibTeX | Links: @article{J20a,
title = {SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits},
author = {M. Maroufi and N. Nikooienejad and M. Mahdavi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08937788.pdf},
doi = {10.1109/JMEMS.2019.2952547},
year = {2020},
date = {2020-02-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {29},
number = {1},
pages = {43--53},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory Journal Article IEEE Transactions on Control Systems Technology, 28 (21), pp. 436 - 447, 2020. BibTeX | Links: @article{J20b,
title = {Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory},
author = {N. Nikooienejad and A. Alipour and M. Maroufi and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08575120.pdf},
doi = {10.1109/TCST.2018.2879939},
year = {2020},
date = {2020-01-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {28},
number = {21},
pages = {436 - 447},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. B. Coskun; H. Alemansour; A. G. Fowler; M. Maroufi; S. O. R. Moheimani Q Control of an Active AFM CantileverWith Differential Sensing Configuration Journal Article IEEE Transactions on Control Systems Technology, 27 (5), pp. 2271 - 2278, 2019. BibTeX | Links: @article{J17a,
title = {Q Control of an Active AFM CantileverWith Differential Sensing Configuration},
author = {M. B. Coskun and H. Alemansour and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08410617.pdf},
doi = {10.1109/TCST.2018.2850338},
year = {2019},
date = {2019-09-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {27},
number = {5},
pages = { 2271 - 2278},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design Journal Article Review of Scientific Instruments, 90 , pp. 073702 (10pp), 2019. BibTeX | Links: @article{J19d,
title = {Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design},
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/1.5098499.pdf},
doi = {10.1063/1.5098499},
year = {2019},
date = {2019-07-10},
journal = {Review of Scientific Instruments},
volume = {90},
pages = {073702 (10pp)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; H. Alemansour; M. B. Coskun; S. O. R. Moheimani An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control Journal Article Mechatronics, 56 , pp. 198–210, 2018. BibTeX | Links: @article{J18c,
title = {An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control},
author = {M. Maroufi and H. Alemansour and M. B. Coskun and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/1-s2.0-S095741581830076X-main.pdf},
year = {2018},
date = {2018-12-03},
journal = {Mechatronics},
volume = {56},
pages = {198--210},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. B. Coskun; A. G. Fowler; M. Maroufi; S. O. R. Moheimani On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers Journal Article IEEE Journal of Microelectromechanical Systems, 26 (6), pp. 1287 – 1297, 2017. BibTeX | Links: @article{J17g,
title = {On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers},
author = {M. B. Coskun and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08006210.pdf},
year = {2017},
date = {2017-12-04},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {6},
pages = {1287 -- 1297},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; A. G. Fowler; S. O. R. Moheimani MEMS for Nanopositioning: Design and Applications Journal Article IEEE Journal of Microelectromechanical Systems, 26 (3), pp. 469–500, 2017. BibTeX | Links: @article{J17c,
title = {MEMS for Nanopositioning: Design and Applications},
author = {M. Maroufi and A. G. Fowler and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07904597-1.pdf},
doi = {10.1109/JMEMS.2017.2687861},
year = {2017},
date = {2017-08-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {3},
pages = {469--500},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; S. O. R. Moheimani An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors Journal Article IEEE Sensors Journal, 17 (10), pp. 3030–3040, 2017. BibTeX | Links: @article{J17e,
title = {An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors},
author = {M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07885544-1.pdf},
year = {2017},
date = {2017-05-15},
journal = {IEEE Sensors Journal},
volume = {17},
number = {10},
pages = {3030--3040},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. G. Ruppert; A. G. Fowler; M. Maroufi; S. O. R. Moheimani On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach Journal Article IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215 - 225, 2017. BibTeX | Links: @article{J17a,
title = {On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach},
author = {M. G. Ruppert and A. G. Fowler and M. Maroufi and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07775031-2.pdf},
doi = {10.1109/JMEMS.2016.2628890},
year = {2017},
date = {2017-02-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {1},
pages = {215 - 225},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Bazaei; M. Maroufi; A. G. Fowler; S. O. R. Moheimani Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners Journal Article IEEE Transactions on Control Systems Technology, 24 (5), pp. 1717–1728, 2016. BibTeX | Links: @article{J16c,
title = {Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners},
author = {A. Bazaei and M. Maroufi and A. G. Fowler and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07378919.pdf},
year = {2016},
date = {2016-09-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {24},
number = {5},
pages = {1717--1728},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; S. O. R. Moheimani A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors Journal Article IEEE Sensors Journal, 16 (7), pp. 1908–1917, 2016. BibTeX | Links: @article{J16b,
title = {A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors},
author = {M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07342875.pdf},
doi = {10.1109/JSEN.2015.2504846},
year = {2016},
date = {2016-04-01},
journal = {IEEE Sensors Journal},
volume = {16},
number = {7},
pages = {1908--1917},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Bazaei; M. Maroufi; S. O. R. Moheimani On the modeling of tilted fixed-guided flexible beams under tension Journal Article Acta Mechanica, 227 (2), pp. 333–352, 2016. BibTeX | Links: @article{J16h,
title = {On the modeling of tilted fixed-guided flexible beams under tension},
author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/J16c.pdf},
doi = {10.1007/s00707-015-1448-6},
year = {2016},
date = {2016-02-01},
journal = {Acta Mechanica},
volume = {227},
number = {2},
pages = {333--352},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; A. G. Fowler; S. O. R. Moheimani MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design Journal Article IEEE Journal of Microelectromechanical Systems, 24 (6), pp. 1730–1740, 2015. BibTeX | Links: @article{J15h,
title = {MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design},
author = { M. Maroufi and A. G. Fowler and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/07116478.pdf},
year = {2015},
date = {2015-12-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {24},
number = {6},
pages = {1730--1740},
key = {J15h},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; A. Bazaei; A. Mohammadi; S. O. R. Moheimani Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization Journal Article IEEE Journal of Microelectromechanical Systems, 24 (5), pp. 1594–1604, 2015. BibTeX | Links: @article{j15j,
title = {Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization},
author = { M. Maroufi and A. Bazaei and A. Mohammadi and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/J15j.pdf},
year = {2015},
date = {2015-10-14},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {24},
number = {5},
pages = {1594--1604},
key = {j15j},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. G. Fowler; M. Maroufi; S. O. R. Moheimani A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy Journal Article Review of Scientific Instruments, 86 (4), pp. 046107, 2015. BibTeX | Links: @article{J15i,
title = {A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy},
author = { A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/J15i.pdf},
year = {2015},
date = {2015-04-21},
journal = {Review of Scientific Instruments},
volume = {86},
number = {4},
pages = {046107},
key = {J15i},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; A. Bazaei; S. O. R. Moheimani A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control Journal Article IEEE Transactions on Control Systems Technology, 23 (2), pp. 504-512, 2015. BibTeX | Links: @article{J15e,
title = {A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control},
author = { M. Maroufi and A. Bazaei and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/J15e.pdf},
year = {2015},
date = {2015-03-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {23},
number = {2},
pages = {504-512},
key = {J15e},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; A. G. Fowler; A. Bazaei; S. O. R. Moheimani High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM Journal Article Review of Scientific Instruments, 86 (2), pp. 023705 (12pp), 2015. BibTeX | Links: @article{J15g,
title = {High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM},
author = { M. Maroufi and A. G. Fowler and A. Bazaei and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/J15g.pdf},
year = {2015},
date = {2015-01-01},
journal = {Review of Scientific Instruments},
volume = {86},
number = {2},
pages = {023705 (12pp)},
key = {J15g},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Bazaei; M. Maroufi; A. Mohammadi; S. O. R. Moheimani Displacement Sensing with Silicon Flexures in MEMS Nanopositioners Journal Article IEEE Journal of Microelectromechanical Systems, 23 (3), pp. 502–504, 2014. BibTeX | Links: @article{J14n,
title = {Displacement Sensing with Silicon Flexures in MEMS Nanopositioners},
author = { A. Bazaei and M. Maroufi and A. Mohammadi and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/J14n.pdf},
year = {2014},
date = {2014-06-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {23},
number = {3},
pages = {502--504},
key = {J14n},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
Inproceedings
|
| E. Khodabakhshi; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Design and Characterization of a Novel High-bandwidth Flexure-guided XY Nanopositioner Inproceedings Proc. 9th IFAC Symposium on Mechatronic Systems, Los Angeles, CA, 2022. BibTeX @inproceedings{C22e,
title = {Design and Characterization of a Novel High-bandwidth Flexure-guided XY Nanopositioner},
author = {E. Khodabakhshi and N. Nikooienejad and M. Maroufi and S. O. R. Moheimani },
year = {2022},
date = {2022-09-06},
urldate = {2022-09-06},
booktitle = {Proc. 9th IFAC Symposium on Mechatronic Systems},
address = {Los Angeles, CA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| E. Khodabakhshi; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner Inproceedings Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA), pp. 1313-1318, Trieste, Italy, 2022. BibTeX @inproceedings{C22a,
title = {Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner},
author = {E. Khodabakhshi and N. Nikooienejad and M. Maroufi and S. O. R. Moheimani },
year = {2022},
date = {2022-08-03},
urldate = {2022-08-03},
booktitle = {Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA)},
pages = {1313-1318},
address = {Trieste, Italy},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Iterative Learning Control for High-Speed Rosette Trajectory Tracking Inproceedings IEEE Conference on Decision and Control , Nice, France, 2019. BibTeX @inproceedings{C19e,
title = {Iterative Learning Control for High-Speed Rosette Trajectory Tracking },
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani},
year = {2019},
date = {2019-12-11},
booktitle = {IEEE Conference on Decision and Control },
address = {Nice, France},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| H. Alemansour; M. Maroufi; A. Alipour; S. O. R. Moheimani A Feedback Controlled MEMS Probe Scanner for On-Chip AFM Inproceedings 8th IFAC Symposium on Mechatronic Systems, Vienna, Austria, 2019. BibTeX @inproceedings{C19c,
title = {A Feedback Controlled MEMS Probe Scanner for On-Chip AFM},
author = {H. Alemansour and M. Maroufi and A. Alipour and S. O. R. Moheimani},
year = {2019},
date = {2019-09-04},
booktitle = {8th IFAC Symposium on Mechatronic Systems},
address = {Vienna, Austria},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Characterization of a Tilted-Beam Piezoresistive MEMS Sensor with Current-Drive Readout Circuit Inproceedings American Control Conference, Philadelphia, PA, USA, 2019. BibTeX @inproceedings{C19b,
title = {Characterization of a Tilted-Beam Piezoresistive MEMS Sensor with Current-Drive Readout Circuit },
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani },
year = {2019},
date = {2019-07-10},
booktitle = {American Control Conference},
address = {Philadelphia, PA, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi; A. Alipour; H. Alemansour; S. O. R. Moheimani Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy Inproceedings International Conference on Manipulation Automation and Robotics at Small Scales, Helsinki, Finland, 2019. BibTeX | Links: @inproceedings{C19a,
title = {Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy},
author = {M. Maroufi and A. Alipour and H. Alemansour and S. O. R. Moheimani },
doi = {10.1109/MARSS.2019.8860968},
year = {2019},
date = {2019-07-01},
booktitle = {International Conference on Manipulation Automation and Robotics at Small Scales},
address = {Helsinki, Finland},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad; M. Maroufi; S. O. R. Moheimani A novel non-raster scan method for AFM imaging Inproceedings ASME Dynamic Systems and Control Conference, Atlanta, Georgia, 2018. BibTeX @inproceedings{C18d,
title = {A novel non-raster scan method for AFM imaging},
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani},
year = {2018},
date = {2018-09-30},
booktitle = {ASME Dynamic Systems and Control Conference},
address = {Atlanta, Georgia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy Inproceedings IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018, Auckland, New Zealand, 2018. BibTeX @inproceedings{C18b,
title = {Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy},
author = {N. Nikooienejad and A. Alipour and M. Maroufi and S. O. R. Moheimani },
year = {2018},
date = {2018-07-09},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018},
address = {Auckland, New Zealand},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Alipour; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner Inproceedings AMERICAN CONTROL CONFERENCE, Milwaukee, Wisconsin, 2018. BibTeX @inproceedings{C18c,
title = {Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner},
author = {A. Alipour and N. Nikooienejad and M. Maroufi and S. O. R. Moheimani},
year = {2018},
date = {2018-06-27},
booktitle = {AMERICAN CONTROL CONFERENCE},
address = {Milwaukee, Wisconsin},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi; A. G. Fowler; S. O. R. Moheimani MEMS in Nanopositioning Inproceedings 16th International Conference on New Actuators, ACTUATOR 2018 , Bremen, Germany, 2018. BibTeX @inproceedings{C18a,
title = {MEMS in Nanopositioning},
author = {M. Maroufi and A. G. Fowler and S. O. R. Moheimani },
year = {2018},
date = {2018-06-25},
booktitle = {16th International Conference on New Actuators, ACTUATOR 2018 },
address = {Bremen, Germany},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei; M. Maroufi; S. O. R. Moheimani Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control Inproceedings IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017. BibTeX @inproceedings{C17h,
title = {Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control},
author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani},
year = {2017},
date = {2017-08-28},
booktitle = {IEEE Conference on Control Technology and Applications},
address = {Hawaii, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi; H. Alemansour; S. O. R. Moheimani A Closed-Loop MEMS Force Sensor with Adjustable Stiffness Inproceedings IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017. BibTeX @inproceedings{C17i,
title = {A Closed-Loop MEMS Force Sensor with Adjustable Stiffness},
author = {M. Maroufi and H. Alemansour and S. O. R. Moheimani },
year = {2017},
date = {2017-08-28},
booktitle = {IEEE Conference on Control Technology and Applications},
address = {Hawaii, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. G. Ruppert; M. Maroufi; A. Bazaei; S. O. R. Moheimani Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner Inproceedings 20th IFAC World Congress, Toulouse, France, 2017. BibTeX @inproceedings{C17d,
title = {Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner},
author = {M. G. Ruppert and M. Maroufi and A. Bazaei and S. O. R. Moheimani },
year = {2017},
date = {2017-07-10},
booktitle = {20th IFAC World Congress},
address = {Toulouse, France},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei; M. Maroufi; S. O. R. Moheimani Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method Inproceedings 20th IFAC World Congress, Toulouse, France, 2017. BibTeX @inproceedings{C17e,
title = {Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method},
author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani },
year = {2017},
date = {2017-07-10},
booktitle = {20th IFAC World Congress},
address = {Toulouse, France},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi; M. G. Ruppert; A. G. Fowler; S. O. R. Moheimani Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope Inproceedings American Control Conference, Seattle, WA, USA, 2017. BibTeX @inproceedings{C17c,
title = {Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope},
author = {M. Maroufi and M. G. Ruppert and A. G. Fowler and S. O. R. Moheimani },
year = {2017},
date = {2017-05-24},
booktitle = {American Control Conference},
address = {Seattle, WA, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi; S. O. R. Moheimani Characterization of piezoresistive and electrothermal sensors in MEMS devices Inproceedings IEEE Sensors Conference, Orlando, FL., USA, 2016. BibTeX | Links: @inproceedings{C16e,
title = {Characterization of piezoresistive and electrothermal sensors in MEMS devices},
author = {M. Maroufi and S. O. R. Moheimani },
doi = { 10.1109/ICSENS.2016.7808953},
year = {2016},
date = {2016-10-30},
booktitle = {IEEE Sensors Conference},
address = {Orlando, FL., USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi; S. O. R. Moheimani Cross coupling in parallel kinematic MEMS nanopositioners Inproceedings ASME Conference on Dynamic Systems and Control, Columbus , Ohio, USA, 2015. BibTeX @inproceedings{C15e,
title = {Cross coupling in parallel kinematic MEMS nanopositioners},
author = {M. Maroufi and S. O. R. Moheimani},
year = {2015},
date = {2015-10-30},
booktitle = {ASME Conference on Dynamic Systems and Control},
address = {Columbus , Ohio, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei; A. G. Fowler; M. Maroufi; S. O. R. Moheimani Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner Inproceedings IEEE Multiconference on Systems and Control, Sydney, Australia, 2015. BibTeX @inproceedings{C15g,
title = {Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner},
author = {A. Bazaei and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
year = {2015},
date = {2015-09-21},
booktitle = {IEEE Multiconference on Systems and Control},
address = {Sydney, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi; Y. K. Yong; S. O. R. Moheimani Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors Inproceedings IEEE Multiconference on Systems and Control, Sydney, Australia, 2015. BibTeX @inproceedings{C15h,
title = {Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors},
author = {M. Maroufi and Y. K. Yong and S. O. R. Moheimani},
year = {2015},
date = {2015-09-21},
booktitle = {IEEE Multiconference on Systems and Control},
address = {Sydney, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei; M. Maroufi; S. O. R. Moheimani Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift Inproceedings Proc. American Control Conference, Chicago, IL, USA, 2015. BibTeX @inproceedings{C15b,
title = {Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift},
author = { A. Bazaei and M. Maroufi and S. O. R. Moheimani},
year = {2015},
date = {2015-07-01},
booktitle = {Proc. American Control Conference},
address = {Chicago, IL, USA},
key = {C15b},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. G. Fowler; M. Maroufi; A. Bazaei; S. O. R. Moheimani MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy Inproceedings ASME Dynamic Systems and Control Conference, San Antonio, Texas, USA, 2014. BibTeX @inproceedings{C14k,
title = {MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy},
author = { A. G. Fowler and M. Maroufi and A. Bazaei and S. O. R. Moheimani},
year = {2014},
date = {2014-10-01},
booktitle = {ASME Dynamic Systems and Control Conference},
address = {San Antonio, Texas, USA},
key = {C14k},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei; M. Maroufi; A. Mohammadi; S. O. R. Moheimani Development of a MEMS Position Transducer Using Bulk Piezoresistivity of Suspensions Inproceedings Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, 2014. BibTeX @inproceedings{C14i,
title = {Development of a MEMS Position Transducer Using Bulk Piezoresistivity of Suspensions},
author = { A. Bazaei and M. Maroufi and A. Mohammadi and S. O. R. Moheimani},
year = {2014},
date = {2014-07-01},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},
address = {Besancon, France},
key = {C14i},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi; S. O. R. Moheimani Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner Inproceedings Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013. BibTeX @inproceedings{C13i,
title = {Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner},
author = { M. Maroufi and S. O. R. Moheimani},
year = {2013},
date = {2013-07-01},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},
address = {Wollongong, Australia},
key = {C13i},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|