LDCN’s on-chip AFM research featured in IEEE Spectrum

LDCN’s recent development of a silicon-on-insulator MEMS-based atomic force microscope has recently been featured in IEEE Spectrum in the article New Paradigm in Microscopy: Atomic Force Microscope on a Chip. The article highlights the group’s latest results from their ongoing research in on-chip atomic force microscopy, which has led to the development of a single-chip MEMS device designed for tapping-mode AFM that features an in-plane scanner and an integrated microcantilever with piezoelectric actuation and sensing. Further details about the on-chip AFM are reported in IEEE Journal of Microelectromechanical Systems.