Dr. Anthony Fowler’s Publications

 


Journal Articles

M. B. Coskun; H. Alemansour; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

Q Control of an Active AFM CantileverWith Differential Sensing Configuration Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 27, no. 5, pp. 2271 - 2278, 2019.

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M. B. Coskun; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 6, pp. 1287 – 1297, 2017.

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M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS for Nanopositioning: Design and Applications Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 3, pp. 469–500, 2017.

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M. G. Ruppert; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 1, pp. 215 - 225, 2017.

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A. G. Fowler; S. O. R. Moheimani

A 4-DOF MEMS Energy Harvester Using Ultrasonic Excitation Journal Article

In: IEEE Sensors Journal, vol. 16, no. 21, pp. 7774–7783, 2016.

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A. Bazaei; M. Maroufi; A. G. Fowler; S. O. R. Moheimani

Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 24, no. 5, pp. 1717–1728, 2016.

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M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 24, no. 6, pp. 1730–1740, 2015.

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A. G. Fowler; M. Maroufi; S. O. R. Moheimani

A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy Journal Article

In: Review of Scientific Instruments, vol. 86, no. 4, pp. 046107, 2015.

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M. Maroufi; A. G. Fowler; A. Bazaei; S. O. R. Moheimani

High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM Journal Article

In: Review of Scientific Instruments, vol. 86, no. 2, pp. 023705 (12pp), 2015.

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B. Piriyanont; A. G. Fowler; S. O. R. Moheimani

Force-Controlled MEMS Rotary Micro-Gripper Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 24, no. 4, pp. 1164–1172, 2015.

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A. G. Fowler; S. O. R. Moheimani; S. Behrens

An Omnidirectional MEMS Ultrasonic Energy Harvester for Implanted Devices Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 23, no. 6, pp. 1454–1462, 2014.

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M. Rakotondrabe; A. G. Fowler; S. O. R. Moheimani

Control of a Novel 2-DoF MEMS Nanopositioner with Electrothermal Actuation and Sensing Journal Article

In: IEEE Transactions on Control Systems Technology, vol. 22, no. 4, pp. 1486–1497, 2014.

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A. Mohammadi; A. G. Fowler; Y. K. Yong; S. O. R. Moheimani

A Feedback Controlled MEMS Nanopositioner for On-Chip High-Speed AFM Journal Article

In: IEEE Journal of Microelectromechanical Systems, vol. 23, no. 3, pp. 610–619, 2014.

BibTeX | Links:

A. G. Fowler; S. O. R. Moheimani; S. Behrens

Design and Characterization of a 2-DOF MEMS Ultrasonic Energy Harvester with Triangular Electrostatic Electrodes Journal Article

In: IEEE Electron Device Letters, vol. 34, no. 11, pp. 1421–1423, 2013.

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A. G. Fowler; A. Bazaei; S. O. R. Moheimani

Design and Analysis of Non-Uniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement Sensing Journal Article

In: IEEE/ASME Journal of Microelectromechanical Systems, vol. 22, no. 3, pp. 687–694, 2013.

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A. G. Fowler; S. O. R. Moheimani

A 3-DOF SOI MEMS ultrasonic energy harvester for implanted devices Journal Article

In: Journal of Physics: Conference Series, vol. 476, no. 1, pp. (012002), 2013.

BibTeX

A. G. Fowler; A. N. Laskovski; A. C. Hammond; S. O. R. Moheimani

A 2-DoF Electrostatically Actuated MEMS Nanopositioner for On-Chip AFM Journal Article

In: IEEE/ASME Journal of Microelectromechanical Systems, vol. 21, no. 4, pp. 771–773, 2012, (DOI: 10.1109/JMEMS.2012.2191940).

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Inproceedings

M. Maroufi; A. G. Fowler; S. O. R. Moheimani

MEMS in Nanopositioning Inproceedings

In: 16th International Conference on New Actuators, ACTUATOR 2018 , Bremen, Germany, 2018.

BibTeX

A. G. Fowler; M. B. Coskun; S. O. R. Moheimani

Q Control of a Microfabricated Piezoelectric Cantilever with On-Chip Feedthrough Cancellation Inproceedings

In: IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017.

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M. Maroufi; M. G. Ruppert; A. G. Fowler; S. O. R. Moheimani

Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope Inproceedings

In: American Control Conference, Seattle, WA, USA, 2017.

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F. Tajaddodianfar; A. G. Fowler; S. O. R. Moheimani; E. Fuchs; J. N. Randall

Frequency-Domain Closed-Loop System Identification of a Scanning Tunneling Microscope Inproceedings

In: Proc. 2016 ASPE Spring Topical Meeting Precision Mechatronic System Design and Control, Boston, MA, 2016.

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A. Bazaei; A. G. Fowler; M. Maroufi; S. O. R. Moheimani

Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner Inproceedings

In: IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.

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A. G. Fowler; S. O. R. Moheimani

4-DOF SOI-MEMS Ultrasonic Energy Harvester Inproceedings

In: Proc. IEEE Conference on Nanotechnology, Rome, Italy, 2015.

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A. G. Fowler; M. Maroufi; A. Bazaei; S. O. R. Moheimani

MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy Inproceedings

In: ASME Dynamic Systems and Control Conference, San Antonio, Texas, USA, 2014.

BibTeX

A. Bazaei; A. G. Fowler; S. O. R. Moheimani

Nonlinear Analysis of Electrothermal Position Sensors with Contoured Heaters Inproceedings

In: Proc. IEEE Sensors Conference, Baltimore, Maryland, USA, 2013.

BibTeX

A. G. Fowler; S. O. R. Moheimani; S. Behrens

A MEMS Electromagnetic Energy Harvester using Ultrasonic Excitation Inproceedings

In: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013.

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A. G. Fowler; M. Rakotondrabe; S. O. R. Moheimani

Closed-Loop Control of a Novel 2-DOF MEMS Nanopositioner with Electrothermal Actuation Inproceedings

In: Proc. 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

BibTeX

Y. K. Yong; A. G. Fowler; A. Mohammadi; S. O. R. Moheimani

Control of a MEMS Nanopositioner for Atomic Force Microscopy Inproceedings

In: Proc. 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

BibTeX

A. Bazaei; A. G. Fowler; S. O. R. Moheimani

Improved Electrothermal Position Sensing in MEMS with Non-uniformly Shaped Heaters Inproceedings

In: Proc. IEEE Sensors Conference, Taipei, Taiwan, 2012.

BibTeX

A. G. Fowler; S. O. R. Moheimani; S. Behrens

A 3-DoF MEMS Ultrasonic Energy Harvester Inproceedings

In: Proc. IEEE Sensors Conference, Taipei, Taiwan, 2012.

BibTeX

M. Rakotondrabe; A. G. Fowler; S. O. R. Moheimani

Characterization of a 2-dof Electrothermal MEMS with Integrated Actuation and Sensing Capability Inproceedings

In: Proc. IEEE Sensors Conference, Taipei, Taiwan, 2012.

BibTeX

S. O. R. Moheimani; A. C. Hammond; A. N. Laskovski; A. G. Fowler

MEMS Nanopositioning for On-Chip Atomic Force Microscopy Inproceedings

In: Proc. International Conference On Nanoscience and Nanotechnology, Perth, Australia, 2012.

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