Publications

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2017

M. Maroufi, A. G. Fowler, S. O. R. Moheimani

MEMS for Nanopositioning: Design and Applications (Journal Article)

IEEE Journal of Microelectromechanical Systems, 2017, (Accepted for publication).

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M. G. Ruppert, A. G. Fowler, M. Maroufi, S. O. R. Moheimani

On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach (Journal Article)

IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215 - 225, 2017.

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2016

A. G. Fowler, S. O. R. Moheimani

A 4-DOF MEMS Energy Harvester Using Ultrasonic Excitation (Journal Article)

IEEE Sensors Journal, 16 (21), pp. 7774–7783, 2016.

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M. Maroufi, S. O. R. Moheimani

Characterization of piezoresistive and electrothermal sensors in MEMS devices (Inproceeding)

IEEE Sensors Conference, Orlando, FL., USA, 2016.

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A. Bazaei, M. Maroufi, A. G. Fowler, S. O. R. Moheimani

Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners (Journal Article)

IEEE Transactions on Control Systems Technology, 24 (5), pp. 1717–1728, 2016.

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S. I. Moore, S. O. R. Moheimani

A switched actuation and sensing method for a MEMS electrostatic drive (Inproceeding)

Proc. 2016 American Control Conference, 2016.

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