Steven Moore received a Bachelor of Electrical Engineering with first class honours and a Bachelor of Mathematics from the University of Newcastle, Australia, in 2012. During his undergraduate studies he worked for the industrial control firm Matrikon programming PLCs and developing SCADA systems. He is currently pursuing a Master of Philosophy in electrical engineering at the University of Newcastle. His research focus is on the control and design of oscillators based on MEMS resonators.
Feedback Controlled MEMS Force Sensor for Characterization of Microcantilevers Journal Article
IEEE Journal of Microelectromechanical Systems, 24 (4), pp. 1092–1101, 2015.
Vibration Control With MEMS Electrostatic Drives: A Self-Sensing Approach Journal Article
IEEE Transactions on Control Systems Technology, 23 (3), pp. 1237-1244, 2015.
Displacement Measurement With a Self-Sensing MEMS Electrostatic Drive Journal Article
IEEE Journal of Microelectromechanical Systems, 23 (3), pp. 511–513, 2014.
Zero Displacement MEMS Force Sensor using Feedback Control Journal Article
Applied Physics Letters, 104 (15), pp. 153502 (4pp), 2014.
Switched Self-Sensing Actuator for a MEMS Nanopositioner Inproceedings
IEEE-ICM International Conference on Mechatronics, Gippsland, Australia, 2017.
A switched actuation and sensing method for a MEMS electrostatic drive Inproceedings
Proc. 2016 American Control Conference, 2016.
Force-Compensating MEMS Sensor for AFM Cantilever Stiffness Calibration Inproceedings
Proc. IEEE Sensors Conference, Valencia, Spain, 2014.
Simultaneous Actuation and Sensing for Electrostatic Drives in MEMS using Frequency Modulated Capacitive Sensing Inproceedings
Proc. 19th IFAC World Congress, Cape Town, South Africa, 2014.
Self-Sensing Electrostatic Drive in a MEMS Nanopositioner for the Application of Vibration Control Inproceedings
Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, 2014.
MEMS Based Oscillator Incorporating A Displacement Sensor Inproceedings
Proc. Australian Control Conference, Perth, Australia, 2013.
MEMS Resonator With Displacement Sensor Based On Thermal Principles Inproceedings
Proc. 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.