Journal Articles |
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N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Iterative Learning Control for Video-rate Atomic Force Microscopy Journal Article IEEE/ASME Transactions on Mechatronics, 26 (4), pp. 2127 - 2138, 2020. BibTeX | Links: @article{J20g, title = {Iterative Learning Control for Video-rate Atomic Force Microscopy}, author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani }, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/TMECH3032565-1.pdf}, doi = {10.1109/TMECH.2020.3032565}, year = {2020}, date = {2020-08-01}, journal = {IEEE/ASME Transactions on Mechatronics}, volume = {26}, number = {4}, pages = {2127 - 2138}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. Maroufi; H. Alemansour; S. O. R. Moheimani A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor Journal Article IEEE Journal of Microelectromechanical Systems, 29 (3), pp. 397 - 407, 2020. BibTeX | Links: @article{J20f, title = {A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor}, author = {M. Maroufi and H. Alemansour and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/A_High_Dynamic_Range_Closed-Loop_Stiffness-Adjustable_MEMS_Force_Sensor.pdf}, doi = {10.1109/JMEMS.2020.2983193}, year = {2020}, date = {2020-06-01}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {29}, number = {3}, pages = {397 - 407}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. Maroufi; N. Nikooienejad; M. Mahdavi; S. O. R. Moheimani SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits Journal Article IEEE Journal of Microelectromechanical Systems, 29 (1), pp. 43–53, 2020. BibTeX | Links: @article{J20a, title = {SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits}, author = {M. Maroufi and N. Nikooienejad and M. Mahdavi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08937788.pdf}, doi = {10.1109/JMEMS.2019.2952547}, year = {2020}, date = {2020-02-01}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {29}, number = {1}, pages = {43--53}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory Journal Article IEEE Transactions on Control Systems Technology, 28 (21), pp. 436 - 447, 2020. BibTeX | Links: @article{J20b, title = {Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory}, author = {N. Nikooienejad and A. Alipour and M. Maroufi and S. O. R. Moheimani }, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08575120.pdf}, doi = {10.1109/TCST.2018.2879939}, year = {2020}, date = {2020-01-01}, journal = {IEEE Transactions on Control Systems Technology}, volume = {28}, number = {21}, pages = {436 - 447}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. B. Coskun; H. Alemansour; A. G. Fowler; M. Maroufi; S. O. R. Moheimani Q Control of an Active AFM CantileverWith Differential Sensing Configuration Journal Article IEEE Transactions on Control Systems Technology, 27 (5), pp. 2271 - 2278, 2019. BibTeX | Links: @article{J17a, title = {Q Control of an Active AFM CantileverWith Differential Sensing Configuration}, author = {M. B. Coskun and H. Alemansour and A. G. Fowler and M. Maroufi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08410617.pdf}, doi = {10.1109/TCST.2018.2850338}, year = {2019}, date = {2019-09-01}, journal = {IEEE Transactions on Control Systems Technology}, volume = {27}, number = {5}, pages = { 2271 - 2278}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design Journal Article Review of Scientific Instruments, 90 , pp. 073702 (10pp), 2019. BibTeX | Links: @article{J19d, title = {Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design}, author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/1.5098499.pdf}, doi = {10.1063/1.5098499}, year = {2019}, date = {2019-07-10}, journal = {Review of Scientific Instruments}, volume = {90}, pages = {073702 (10pp)}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. Maroufi; H. Alemansour; M. B. Coskun; S. O. R. Moheimani An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control Journal Article Mechatronics, 56 , pp. 198–210, 2018. BibTeX | Links: @article{J18c, title = {An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control}, author = {M. Maroufi and H. Alemansour and M. B. Coskun and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/1-s2.0-S095741581830076X-main.pdf}, year = {2018}, date = {2018-12-03}, journal = {Mechatronics}, volume = {56}, pages = {198--210}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. B. Coskun; A. G. Fowler; M. Maroufi; S. O. R. Moheimani On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers Journal Article IEEE Journal of Microelectromechanical Systems, 26 (6), pp. 1287 – 1297, 2017. BibTeX | Links: @article{J17g, title = {On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers}, author = {M. B. Coskun and A. G. Fowler and M. Maroufi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08006210.pdf}, year = {2017}, date = {2017-12-04}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {26}, number = {6}, pages = {1287 -- 1297}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. Maroufi; A. G. Fowler; S. O. R. Moheimani MEMS for Nanopositioning: Design and Applications Journal Article IEEE Journal of Microelectromechanical Systems, 26 (3), pp. 469–500, 2017. BibTeX | Links: @article{J17c, title = {MEMS for Nanopositioning: Design and Applications}, author = {M. Maroufi and A. G. Fowler and S. O. R. Moheimani }, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07904597-1.pdf}, doi = {10.1109/JMEMS.2017.2687861}, year = {2017}, date = {2017-08-01}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {26}, number = {3}, pages = {469--500}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. Maroufi; S. O. R. Moheimani An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors Journal Article IEEE Sensors Journal, 17 (10), pp. 3030–3040, 2017. BibTeX | Links: @article{J17e, title = {An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors}, author = {M. Maroufi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07885544-1.pdf}, year = {2017}, date = {2017-05-15}, journal = {IEEE Sensors Journal}, volume = {17}, number = {10}, pages = {3030--3040}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. G. Ruppert; A. G. Fowler; M. Maroufi; S. O. R. Moheimani On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach Journal Article IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215 - 225, 2017. BibTeX | Links: @article{J17a, title = {On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach}, author = {M. G. Ruppert and A. G. Fowler and M. Maroufi and S. O. R. Moheimani }, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07775031-2.pdf}, doi = {10.1109/JMEMS.2016.2628890}, year = {2017}, date = {2017-02-01}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {26}, number = {1}, pages = {215 - 225}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
A. Bazaei; M. Maroufi; A. G. Fowler; S. O. R. Moheimani Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners Journal Article IEEE Transactions on Control Systems Technology, 24 (5), pp. 1717–1728, 2016. BibTeX | Links: @article{J16c, title = {Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners}, author = {A. Bazaei and M. Maroufi and A. G. Fowler and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07378919.pdf}, year = {2016}, date = {2016-09-01}, journal = {IEEE Transactions on Control Systems Technology}, volume = {24}, number = {5}, pages = {1717--1728}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. Maroufi; S. O. R. Moheimani A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors Journal Article IEEE Sensors Journal, 16 (7), pp. 1908–1917, 2016. BibTeX | Links: @article{J16b, title = {A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors}, author = {M. Maroufi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07342875.pdf}, doi = {10.1109/JSEN.2015.2504846}, year = {2016}, date = {2016-04-01}, journal = {IEEE Sensors Journal}, volume = {16}, number = {7}, pages = {1908--1917}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
A. Bazaei; M. Maroufi; S. O. R. Moheimani On the modeling of tilted fixed-guided flexible beams under tension Journal Article Acta Mechanica, 227 (2), pp. 333–352, 2016. BibTeX | Links: @article{J16h, title = {On the modeling of tilted fixed-guided flexible beams under tension}, author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/J16c.pdf}, doi = {10.1007/s00707-015-1448-6}, year = {2016}, date = {2016-02-01}, journal = {Acta Mechanica}, volume = {227}, number = {2}, pages = {333--352}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. Maroufi; A. G. Fowler; S. O. R. Moheimani MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design Journal Article IEEE Journal of Microelectromechanical Systems, 24 (6), pp. 1730–1740, 2015. BibTeX | Links: @article{J15h, title = {MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design}, author = { M. Maroufi and A. G. Fowler and S. O. R. Moheimani}, url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/07116478.pdf}, year = {2015}, date = {2015-12-01}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {24}, number = {6}, pages = {1730--1740}, key = {J15h}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. Maroufi; A. Bazaei; A. Mohammadi; S. O. R. Moheimani Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization Journal Article IEEE Journal of Microelectromechanical Systems, 24 (5), pp. 1594–1604, 2015. BibTeX | Links: @article{j15j, title = {Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization}, author = { M. Maroufi and A. Bazaei and A. Mohammadi and S. O. R. Moheimani}, url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J15j.pdf}, year = {2015}, date = {2015-10-14}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {24}, number = {5}, pages = {1594--1604}, key = {j15j}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
A. G. Fowler; M. Maroufi; S. O. R. Moheimani A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy Journal Article Review of Scientific Instruments, 86 (4), pp. 046107, 2015. BibTeX | Links: @article{J15i, title = {A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy}, author = { A. G. Fowler and M. Maroufi and S. O. R. Moheimani}, url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J15i.pdf}, year = {2015}, date = {2015-04-21}, journal = {Review of Scientific Instruments}, volume = {86}, number = {4}, pages = {046107}, key = {J15i}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. Maroufi; A. Bazaei; S. O. R. Moheimani A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control Journal Article IEEE Transactions on Control Systems Technology, 23 (2), pp. 504-512, 2015. BibTeX | Links: @article{J15e, title = {A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control}, author = { M. Maroufi and A. Bazaei and S. O. R. Moheimani}, url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J15e.pdf}, year = {2015}, date = {2015-03-01}, journal = {IEEE Transactions on Control Systems Technology}, volume = {23}, number = {2}, pages = {504-512}, key = {J15e}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
M. Maroufi; A. G. Fowler; A. Bazaei; S. O. R. Moheimani High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM Journal Article Review of Scientific Instruments, 86 (2), pp. 023705 (12pp), 2015. BibTeX | Links: @article{J15g, title = {High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM}, author = { M. Maroufi and A. G. Fowler and A. Bazaei and S. O. R. Moheimani}, url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J15g.pdf}, year = {2015}, date = {2015-01-01}, journal = {Review of Scientific Instruments}, volume = {86}, number = {2}, pages = {023705 (12pp)}, key = {J15g}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
A. Bazaei; M. Maroufi; A. Mohammadi; S. O. R. Moheimani Displacement Sensing with Silicon Flexures in MEMS Nanopositioners Journal Article IEEE Journal of Microelectromechanical Systems, 23 (3), pp. 502–504, 2014. BibTeX | Links: @article{J14n, title = {Displacement Sensing with Silicon Flexures in MEMS Nanopositioners}, author = { A. Bazaei and M. Maroufi and A. Mohammadi and S. O. R. Moheimani}, url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J14n.pdf}, year = {2014}, date = {2014-06-01}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {23}, number = {3}, pages = {502--504}, key = {J14n}, keywords = {}, pubstate = {published}, tppubtype = {article} } | |
Inproceedings |
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E. Khodabakhshi; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Design and Characterization of a Novel High-bandwidth Flexure-guided XY Nanopositioner Inproceedings Proc. 9th IFAC Symposium on Mechatronic Systems, Los Angeles, CA, 2022. @inproceedings{C22e, title = {Design and Characterization of a Novel High-bandwidth Flexure-guided XY Nanopositioner}, author = {E. Khodabakhshi and N. Nikooienejad and M. Maroufi and S. O. R. Moheimani }, year = {2022}, date = {2022-09-06}, urldate = {2022-09-06}, booktitle = {Proc. 9th IFAC Symposium on Mechatronic Systems}, address = {Los Angeles, CA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
E. Khodabakhshi; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner Inproceedings Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA), pp. 1313-1318, Trieste, Italy, 2022. @inproceedings{C22a, title = {Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner}, author = {E. Khodabakhshi and N. Nikooienejad and M. Maroufi and S. O. R. Moheimani }, year = {2022}, date = {2022-08-03}, urldate = {2022-08-03}, booktitle = {Proc. 2022 IEEE Conference on Control Technology and Applications (CCTA)}, pages = {1313-1318}, address = {Trieste, Italy}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Iterative Learning Control for High-Speed Rosette Trajectory Tracking Inproceedings IEEE Conference on Decision and Control , Nice, France, 2019. @inproceedings{C19e, title = {Iterative Learning Control for High-Speed Rosette Trajectory Tracking }, author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani}, year = {2019}, date = {2019-12-11}, booktitle = {IEEE Conference on Decision and Control }, address = {Nice, France}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
H. Alemansour; M. Maroufi; A. Alipour; S. O. R. Moheimani A Feedback Controlled MEMS Probe Scanner for On-Chip AFM Inproceedings 8th IFAC Symposium on Mechatronic Systems, Vienna, Austria, 2019. @inproceedings{C19c, title = {A Feedback Controlled MEMS Probe Scanner for On-Chip AFM}, author = {H. Alemansour and M. Maroufi and A. Alipour and S. O. R. Moheimani}, year = {2019}, date = {2019-09-04}, booktitle = {8th IFAC Symposium on Mechatronic Systems}, address = {Vienna, Austria}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Characterization of a Tilted-Beam Piezoresistive MEMS Sensor with Current-Drive Readout Circuit Inproceedings American Control Conference, Philadelphia, PA, USA, 2019. @inproceedings{C19b, title = {Characterization of a Tilted-Beam Piezoresistive MEMS Sensor with Current-Drive Readout Circuit }, author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani }, year = {2019}, date = {2019-07-10}, booktitle = {American Control Conference}, address = {Philadelphia, PA, USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
M. Maroufi; A. Alipour; H. Alemansour; S. O. R. Moheimani Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy Inproceedings International Conference on Manipulation Automation and Robotics at Small Scales, Helsinki, Finland, 2019. BibTeX | Links: @inproceedings{C19a, title = {Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy}, author = {M. Maroufi and A. Alipour and H. Alemansour and S. O. R. Moheimani }, doi = {10.1109/MARSS.2019.8860968}, year = {2019}, date = {2019-07-01}, booktitle = {International Conference on Manipulation Automation and Robotics at Small Scales}, address = {Helsinki, Finland}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
N. Nikooienejad; M. Maroufi; S. O. R. Moheimani A novel non-raster scan method for AFM imaging Inproceedings ASME Dynamic Systems and Control Conference, Atlanta, Georgia, 2018. @inproceedings{C18d, title = {A novel non-raster scan method for AFM imaging}, author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani}, year = {2018}, date = {2018-09-30}, booktitle = {ASME Dynamic Systems and Control Conference}, address = {Atlanta, Georgia}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
N. Nikooienejad; A. Alipour; M. Maroufi; S. O. R. Moheimani Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy Inproceedings IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018, Auckland, New Zealand, 2018. @inproceedings{C18b, title = {Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy}, author = {N. Nikooienejad and A. Alipour and M. Maroufi and S. O. R. Moheimani }, year = {2018}, date = {2018-07-09}, booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018}, address = {Auckland, New Zealand}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
A. Alipour; N. Nikooienejad; M. Maroufi; S. O. R. Moheimani Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner Inproceedings AMERICAN CONTROL CONFERENCE, Milwaukee, Wisconsin, 2018. @inproceedings{C18c, title = {Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner}, author = {A. Alipour and N. Nikooienejad and M. Maroufi and S. O. R. Moheimani}, year = {2018}, date = {2018-06-27}, booktitle = {AMERICAN CONTROL CONFERENCE}, address = {Milwaukee, Wisconsin}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
M. Maroufi; A. G. Fowler; S. O. R. Moheimani MEMS in Nanopositioning Inproceedings 16th International Conference on New Actuators, ACTUATOR 2018 , Bremen, Germany, 2018. @inproceedings{C18a, title = {MEMS in Nanopositioning}, author = {M. Maroufi and A. G. Fowler and S. O. R. Moheimani }, year = {2018}, date = {2018-06-25}, booktitle = {16th International Conference on New Actuators, ACTUATOR 2018 }, address = {Bremen, Germany}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
A. Bazaei; M. Maroufi; S. O. R. Moheimani Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control Inproceedings IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017. @inproceedings{C17h, title = {Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control}, author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani}, year = {2017}, date = {2017-08-28}, booktitle = {IEEE Conference on Control Technology and Applications}, address = {Hawaii, USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
M. Maroufi; H. Alemansour; S. O. R. Moheimani A Closed-Loop MEMS Force Sensor with Adjustable Stiffness Inproceedings IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017. @inproceedings{C17i, title = {A Closed-Loop MEMS Force Sensor with Adjustable Stiffness}, author = {M. Maroufi and H. Alemansour and S. O. R. Moheimani }, year = {2017}, date = {2017-08-28}, booktitle = {IEEE Conference on Control Technology and Applications}, address = {Hawaii, USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
M. G. Ruppert; M. Maroufi; A. Bazaei; S. O. R. Moheimani Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner Inproceedings 20th IFAC World Congress, Toulouse, France, 2017. @inproceedings{C17d, title = {Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner}, author = {M. G. Ruppert and M. Maroufi and A. Bazaei and S. O. R. Moheimani }, year = {2017}, date = {2017-07-10}, booktitle = {20th IFAC World Congress}, address = {Toulouse, France}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
A. Bazaei; M. Maroufi; S. O. R. Moheimani Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method Inproceedings 20th IFAC World Congress, Toulouse, France, 2017. @inproceedings{C17e, title = {Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method}, author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani }, year = {2017}, date = {2017-07-10}, booktitle = {20th IFAC World Congress}, address = {Toulouse, France}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
M. Maroufi; M. G. Ruppert; A. G. Fowler; S. O. R. Moheimani Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope Inproceedings American Control Conference, Seattle, WA, USA, 2017. @inproceedings{C17c, title = {Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope}, author = {M. Maroufi and M. G. Ruppert and A. G. Fowler and S. O. R. Moheimani }, year = {2017}, date = {2017-05-24}, booktitle = {American Control Conference}, address = {Seattle, WA, USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
M. Maroufi; S. O. R. Moheimani Characterization of piezoresistive and electrothermal sensors in MEMS devices Inproceedings IEEE Sensors Conference, Orlando, FL., USA, 2016. BibTeX | Links: @inproceedings{C16e, title = {Characterization of piezoresistive and electrothermal sensors in MEMS devices}, author = {M. Maroufi and S. O. R. Moheimani }, doi = { 10.1109/ICSENS.2016.7808953}, year = {2016}, date = {2016-10-30}, booktitle = {IEEE Sensors Conference}, address = {Orlando, FL., USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
M. Maroufi; S. O. R. Moheimani Cross coupling in parallel kinematic MEMS nanopositioners Inproceedings ASME Conference on Dynamic Systems and Control, Columbus , Ohio, USA, 2015. @inproceedings{C15e, title = {Cross coupling in parallel kinematic MEMS nanopositioners}, author = {M. Maroufi and S. O. R. Moheimani}, year = {2015}, date = {2015-10-30}, booktitle = {ASME Conference on Dynamic Systems and Control}, address = {Columbus , Ohio, USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
A. Bazaei; A. G. Fowler; M. Maroufi; S. O. R. Moheimani Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner Inproceedings IEEE Multiconference on Systems and Control, Sydney, Australia, 2015. @inproceedings{C15g, title = {Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner}, author = {A. Bazaei and A. G. Fowler and M. Maroufi and S. O. R. Moheimani}, year = {2015}, date = {2015-09-21}, booktitle = {IEEE Multiconference on Systems and Control}, address = {Sydney, Australia}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
M. Maroufi; Y. K. Yong; S. O. R. Moheimani Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors Inproceedings IEEE Multiconference on Systems and Control, Sydney, Australia, 2015. @inproceedings{C15h, title = {Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors}, author = {M. Maroufi and Y. K. Yong and S. O. R. Moheimani}, year = {2015}, date = {2015-09-21}, booktitle = {IEEE Multiconference on Systems and Control}, address = {Sydney, Australia}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
A. Bazaei; M. Maroufi; S. O. R. Moheimani Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift Inproceedings Proc. American Control Conference, Chicago, IL, USA, 2015. @inproceedings{C15b, title = {Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift}, author = { A. Bazaei and M. Maroufi and S. O. R. Moheimani}, year = {2015}, date = {2015-07-01}, booktitle = {Proc. American Control Conference}, address = {Chicago, IL, USA}, key = {C15b}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
A. G. Fowler; M. Maroufi; A. Bazaei; S. O. R. Moheimani MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy Inproceedings ASME Dynamic Systems and Control Conference, San Antonio, Texas, USA, 2014. @inproceedings{C14k, title = {MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy}, author = { A. G. Fowler and M. Maroufi and A. Bazaei and S. O. R. Moheimani}, year = {2014}, date = {2014-10-01}, booktitle = {ASME Dynamic Systems and Control Conference}, address = {San Antonio, Texas, USA}, key = {C14k}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
A. Bazaei; M. Maroufi; A. Mohammadi; S. O. R. Moheimani Development of a MEMS Position Transducer Using Bulk Piezoresistivity of Suspensions Inproceedings Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, 2014. @inproceedings{C14i, title = {Development of a MEMS Position Transducer Using Bulk Piezoresistivity of Suspensions}, author = { A. Bazaei and M. Maroufi and A. Mohammadi and S. O. R. Moheimani}, year = {2014}, date = {2014-07-01}, booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics}, address = {Besancon, France}, key = {C14i}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } | |
M. Maroufi; S. O. R. Moheimani Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner Inproceedings Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013. @inproceedings{C13i, title = {Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner}, author = { M. Maroufi and S. O. R. Moheimani}, year = {2013}, date = {2013-07-01}, booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics}, address = {Wollongong, Australia}, key = {C13i}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |