Journal Articles |
| N. Nikooienejad, A. Alipour, M. Maroufi, S. O. R. Moheimani Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory (Journal Article) IEEE Transactions on Control Systems Technology, 2019, (Accepted for publication). (BibTeX) @article{J19a,
title = {Video-Rate Non-Raster AFM Imaging with Cycloid Trajectory},
author = {N. Nikooienejad and A. Alipour and M. Maroufi and S. O. R. Moheimani },
year = {2019},
date = {2019-01-01},
journal = {IEEE Transactions on Control Systems Technology},
note = {Accepted for publication},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. B. Coskun, H. Alemansour, A. G. Fowler, M. Maroufi, S. O. R. Moheimani Q Control of an Active AFM CantileverWith Differential Sensing Configuration (Journal Article) IEEE Transactions on Control Systems Technology, 2018, (Accepted for publication). (BibTeX | Links:  ) @article{J18e,
title = {Q Control of an Active AFM CantileverWith Differential Sensing Configuration},
author = {M. B. Coskun and H. Alemansour and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08410617.pdf},
year = {2018},
date = {2018-07-16},
journal = {IEEE Transactions on Control Systems Technology},
note = {Accepted for publication},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi, H. Alemansour, M. B. Coskun, S. O. R. Moheimani An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control (Journal Article) Mechatronics, 2018, (Accepted for publication). (BibTeX) @article{J18c,
title = {An Adjustable-stiffness MEMS Force Sensor: Design, Characterization, and Control},
author = {M. Maroufi and H. Alemansour and M. B. Coskun and S. O. R. Moheimani},
year = {2018},
date = {2018-06-30},
journal = {Mechatronics},
note = {Accepted for publication},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. B. Coskun, A. G. Fowler, M. Maroufi, S. O. R. Moheimani On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers (Journal Article) IEEE Journal of Microelectromechanical Systems, 26 (6), pp. 1287 – 1297, 2017. (BibTeX | Links: ) @article{J17g,
title = {On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers},
author = {M. B. Coskun and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08006210.pdf},
year = {2017},
date = {2017-12-04},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {6},
pages = {1287 -- 1297},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi, A. G. Fowler, S. O. R. Moheimani MEMS for Nanopositioning: Design and Applications (Journal Article) IEEE Journal of Microelectromechanical Systems, 26 (3), pp. 469–500, 2017. (BibTeX | Links:  ) @article{J17c,
title = {MEMS for Nanopositioning: Design and Applications},
author = {M. Maroufi and A. G. Fowler and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07904597-1.pdf},
doi = {10.1109/JMEMS.2017.2687861},
year = {2017},
date = {2017-08-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {3},
pages = {469--500},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi, S. O. R. Moheimani An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors (Journal Article) IEEE Sensors Journal, 17 (10), pp. 3030–3040, 2017. (BibTeX | Links: ) @article{J17e,
title = {An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors},
author = {M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07885544-1.pdf},
year = {2017},
date = {2017-05-15},
journal = {IEEE Sensors Journal},
volume = {17},
number = {10},
pages = {3030--3040},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. G. Ruppert, A. G. Fowler, M. Maroufi, S. O. R. Moheimani On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach (Journal Article) IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215 - 225, 2017. (BibTeX | Links: ) @article{J17a,
title = {On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach},
author = {M. G. Ruppert and A. G. Fowler and M. Maroufi and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07775031-2.pdf},
doi = {10.1109/JMEMS.2016.2628890},
year = {2017},
date = {2017-02-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {1},
pages = {215 - 225},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Bazaei, M. Maroufi, A. G. Fowler, S. O. R. Moheimani Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners (Journal Article) IEEE Transactions on Control Systems Technology, 24 (5), pp. 1717–1728, 2016. (BibTeX | Links: ) @article{J16c,
title = {Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners},
author = {A. Bazaei and M. Maroufi and A. G. Fowler and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07378919.pdf},
year = {2016},
date = {2016-09-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {24},
number = {5},
pages = {1717--1728},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi, S. O. R. Moheimani A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors (Journal Article) IEEE Sensors Journal, 16 (7), pp. 1908–1917, 2016. (BibTeX | Links: ) @article{J16b,
title = {A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors},
author = {M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07342875.pdf},
doi = {10.1109/JSEN.2015.2504846},
year = {2016},
date = {2016-04-01},
journal = {IEEE Sensors Journal},
volume = {16},
number = {7},
pages = {1908--1917},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Bazaei, M. Maroufi, S. O. R. Moheimani On the modeling of tilted fixed-guided flexible beams under tension (Journal Article) Acta Mechanica, 227 (2), pp. 333–352, 2016. (BibTeX | Links: ) @article{J16h,
title = {On the modeling of tilted fixed-guided flexible beams under tension},
author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/J16c.pdf},
doi = {10.1007/s00707-015-1448-6},
year = {2016},
date = {2016-02-01},
journal = {Acta Mechanica},
volume = {227},
number = {2},
pages = {333--352},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi, A. G. Fowler, S. O. R. Moheimani MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design (Journal Article) IEEE Journal of Microelectromechanical Systems, 24 (6), pp. 1730–1740, 2015. (BibTeX | Links: ) @article{J15h,
title = {MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design},
author = { M. Maroufi and A. G. Fowler and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/07116478.pdf},
year = {2015},
date = {2015-12-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {24},
number = {6},
pages = {1730--1740},
key = {J15h},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi, A. Bazaei, A. Mohammadi, S. O. R. Moheimani Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization (Journal Article) IEEE Journal of Microelectromechanical Systems, 24 (5), pp. 1594–1604, 2015. (BibTeX | Links: ) @article{j15j,
title = {Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization},
author = { M. Maroufi and A. Bazaei and A. Mohammadi and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/J15j.pdf},
year = {2015},
date = {2015-10-14},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {24},
number = {5},
pages = {1594--1604},
key = {j15j},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. G. Fowler, M. Maroufi, S. O. R. Moheimani A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy (Journal Article) Review of Scientific Instruments, 86 (4), pp. 046107, 2015. (BibTeX | Links: ) @article{J15i,
title = {A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy},
author = { A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/J15i.pdf},
year = {2015},
date = {2015-04-21},
journal = {Review of Scientific Instruments},
volume = {86},
number = {4},
pages = {046107},
key = {J15i},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi, A. Bazaei, S. O. R. Moheimani A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control (Journal Article) IEEE Transactions on Control Systems Technology, 23 (2), pp. 504-512, 2015. (BibTeX | Links: ) @article{J15e,
title = {A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control},
author = { M. Maroufi and A. Bazaei and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/J15e.pdf},
year = {2015},
date = {2015-03-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {23},
number = {2},
pages = {504-512},
key = {J15e},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi, A. G. Fowler, A. Bazaei, S. O. R. Moheimani High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM (Journal Article) Review of Scientific Instruments, 86 (2), pp. 023705 (12pp), 2015. (BibTeX | Links: ) @article{J15g,
title = {High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM},
author = { M. Maroufi and A. G. Fowler and A. Bazaei and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/J15g.pdf},
year = {2015},
date = {2015-01-01},
journal = {Review of Scientific Instruments},
volume = {86},
number = {2},
pages = {023705 (12pp)},
key = {J15g},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Bazaei, M. Maroufi, A. Mohammadi, S. O. R. Moheimani Displacement Sensing with Silicon Flexures in MEMS Nanopositioners (Journal Article) IEEE Journal of Microelectromechanical Systems, 23 (3), pp. 502–504, 2014. (BibTeX | Links: ) @article{J14n,
title = {Displacement Sensing with Silicon Flexures in MEMS Nanopositioners},
author = { A. Bazaei and M. Maroufi and A. Mohammadi and S. O. R. Moheimani},
url = {http://reza.moheimani.org/lab/wp-content/uploads/J14n.pdf},
year = {2014},
date = {2014-06-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {23},
number = {3},
pages = {502--504},
key = {J14n},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
Inproceedings |
| N. Nikooienejad, M. Maroufi, S. O. R. Moheimani A novel non-raster scan method for AFM imaging (Inproceeding) ASME Dynamic Systems and Control Conference, Atlanta, Georgia, 2018. (BibTeX) @inproceedings{C18d,
title = {A novel non-raster scan method for AFM imaging},
author = {N. Nikooienejad and M. Maroufi and S. O. R. Moheimani},
year = {2018},
date = {2018-09-30},
booktitle = {ASME Dynamic Systems and Control Conference},
address = {Atlanta, Georgia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| N. Nikooienejad, A. Alipour, M. Maroufi, S. O. R. Moheimani Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy (Inproceeding) IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018, Auckland, New Zealand, 2018. (BibTeX) @inproceedings{C18b,
title = {Sequential Cycloid Scanning for Time-Resolved Atomic Force Microscopy},
author = {N. Nikooienejad and A. Alipour and M. Maroufi and S. O. R. Moheimani },
year = {2018},
date = {2018-07-09},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM2018},
address = {Auckland, New Zealand},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Alipour, N. Nikooienejad, M. Maroufi, S. O. R. Moheimani Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner (Inproceeding) AMERICAN CONTROL CONFERENCE, Milwaukee, Wisconsin, 2018. (BibTeX) @inproceedings{C18c,
title = {Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner},
author = {A. Alipour and N. Nikooienejad and M. Maroufi and S. O. R. Moheimani},
year = {2018},
date = {2018-06-27},
booktitle = {AMERICAN CONTROL CONFERENCE},
address = {Milwaukee, Wisconsin},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi, A. G. Fowler, S. O. R. Moheimani MEMS in Nanopositioning (Inproceeding) 16th International Conference on New Actuators, ACTUATOR 2018 , Bremen, Germany, 2018. (BibTeX) @inproceedings{C18a,
title = {MEMS in Nanopositioning},
author = {M. Maroufi and A. G. Fowler and S. O. R. Moheimani },
year = {2018},
date = {2018-06-25},
booktitle = {16th International Conference on New Actuators, ACTUATOR 2018 },
address = {Bremen, Germany},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei, M. Maroufi, S. O. R. Moheimani Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control (Inproceeding) IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017. (BibTeX) @inproceedings{C17h,
title = {Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control},
author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani},
year = {2017},
date = {2017-08-28},
booktitle = {IEEE Conference on Control Technology and Applications},
address = {Hawaii, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi, H. Alemansour, S. O. R. Moheimani A Closed-Loop MEMS Force Sensor with Adjustable Stiffness (Inproceeding) IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017. (BibTeX) @inproceedings{C17i,
title = {A Closed-Loop MEMS Force Sensor with Adjustable Stiffness},
author = {M. Maroufi and H. Alemansour and S. O. R. Moheimani },
year = {2017},
date = {2017-08-28},
booktitle = {IEEE Conference on Control Technology and Applications},
address = {Hawaii, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. G. Ruppert, M. Maroufi, A. Bazaei, S. O. R. Moheimani Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner (Inproceeding) 20th IFAC World Congress, Toulouse, France, 2017. (BibTeX) @inproceedings{C17d,
title = {Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner},
author = {M. G. Ruppert and M. Maroufi and A. Bazaei and S. O. R. Moheimani },
year = {2017},
date = {2017-07-10},
booktitle = {20th IFAC World Congress},
address = {Toulouse, France},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei, M. Maroufi, S. O. R. Moheimani Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method (Inproceeding) 20th IFAC World Congress, Toulouse, France, 2017. (BibTeX) @inproceedings{C17e,
title = {Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method},
author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani },
year = {2017},
date = {2017-07-10},
booktitle = {20th IFAC World Congress},
address = {Toulouse, France},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi, M. G. Ruppert, A. G. Fowler, S. O. R. Moheimani Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope (Inproceeding) American Control Conference, Seattle, WA, USA, 2017. (BibTeX) @inproceedings{C17c,
title = {Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope},
author = {M. Maroufi and M. G. Ruppert and A. G. Fowler and S. O. R. Moheimani },
year = {2017},
date = {2017-05-24},
booktitle = {American Control Conference},
address = {Seattle, WA, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi, S. O. R. Moheimani Characterization of piezoresistive and electrothermal sensors in MEMS devices (Inproceeding) IEEE Sensors Conference, Orlando, FL., USA, 2016. (BibTeX | Links: ) @inproceedings{C16e,
title = {Characterization of piezoresistive and electrothermal sensors in MEMS devices},
author = {M. Maroufi and S. O. R. Moheimani },
doi = { 10.1109/ICSENS.2016.7808953},
year = {2016},
date = {2016-10-30},
booktitle = {IEEE Sensors Conference},
address = {Orlando, FL., USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi, S. O. R. Moheimani Cross coupling in parallel kinematic MEMS nanopositioners (Inproceeding) ASME Conference on Dynamic Systems and Control, Columbus , Ohio, USA, 2015. (BibTeX) @inproceedings{C15e,
title = {Cross coupling in parallel kinematic MEMS nanopositioners},
author = {M. Maroufi and S. O. R. Moheimani},
year = {2015},
date = {2015-10-30},
booktitle = {ASME Conference on Dynamic Systems and Control},
address = {Columbus , Ohio, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei, A. G. Fowler, M. Maroufi, S. O. R. Moheimani Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner (Inproceeding) IEEE Multiconference on Systems and Control, Sydney, Australia, 2015. (BibTeX) @inproceedings{C15g,
title = {Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner},
author = {A. Bazaei and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
year = {2015},
date = {2015-09-21},
booktitle = {IEEE Multiconference on Systems and Control},
address = {Sydney, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi, Y. K. Yong, S. O. R. Moheimani Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors (Inproceeding) IEEE Multiconference on Systems and Control, Sydney, Australia, 2015. (BibTeX) @inproceedings{C15h,
title = {Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors},
author = {M. Maroufi and Y. K. Yong and S. O. R. Moheimani},
year = {2015},
date = {2015-09-21},
booktitle = {IEEE Multiconference on Systems and Control},
address = {Sydney, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei, M. Maroufi, S. O. R. Moheimani Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift (Inproceeding) Proc. American Control Conference, Chicago, IL, USA, 2015. (BibTeX) @inproceedings{C15b,
title = {Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift},
author = { A. Bazaei and M. Maroufi and S. O. R. Moheimani},
year = {2015},
date = {2015-07-01},
booktitle = {Proc. American Control Conference},
address = {Chicago, IL, USA},
key = {C15b},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. G. Fowler, M. Maroufi, A. Bazaei, S. O. R. Moheimani MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy (Inproceeding) ASME Dynamic Systems and Control Conference, San Antonio, Texas, USA, 2014. (BibTeX) @inproceedings{C14k,
title = {MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy},
author = { A. G. Fowler and M. Maroufi and A. Bazaei and S. O. R. Moheimani},
year = {2014},
date = {2014-10-01},
booktitle = {ASME Dynamic Systems and Control Conference},
address = {San Antonio, Texas, USA},
key = {C14k},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei, M. Maroufi, A. Mohammadi, S. O. R. Moheimani Development of a MEMS Position Transducer Using Bulk Piezoresistivity of Suspensions (Inproceeding) Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, 2014. (BibTeX) @inproceedings{C14i,
title = {Development of a MEMS Position Transducer Using Bulk Piezoresistivity of Suspensions},
author = { A. Bazaei and M. Maroufi and A. Mohammadi and S. O. R. Moheimani},
year = {2014},
date = {2014-07-01},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},
address = {Besancon, France},
key = {C14i},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi, S. O. R. Moheimani Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner (Inproceeding) Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013. (BibTeX) @inproceedings{C13i,
title = {Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner},
author = { M. Maroufi and S. O. R. Moheimani},
year = {2013},
date = {2013-07-01},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},
address = {Wollongong, Australia},
key = {C13i},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
