Dr. Mohammad Maroufi

Research Associate

Mohammad Maroufi graduated with the B.Sc. degrees in Mechanical Engineering and Applied Physics as a distinguished student from Amirkabir University of Technology (Tehran Polytechnic) in 2008. He continued his studies in a Masters in Mechatronics at the same university, and graduated in 2011. He studied his PhD in Electrical Engineering at the University of Newcastle, Australia. He is currently a Research Associate in the Department of Mechanical Engineering at the University of Texas at Dallas. His research interests include the design and control of MEMS nanopositioning systems, MEMS based sensing and actuation, on-chip atomic force microscopy, and modeling of smart materials and structures.

Complete list of publications at Google Scholar

 


Journal Articles

M. Maroufi, A. G. Fowler, S. O. R. Moheimani

MEMS for Nanopositioning: Design and Applications (Journal Article)

IEEE Journal of Microelectromechanical Systems, 26 (3), pp. 469–500, 2017.

(BibTeX | Links: )

M. B. Coskun, A. G. Fowler, M. Maroufi, S. O. R. Moheimani

On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers (Journal Article)

IEEE Journal of Microelectromechanical Systems, 2017, (Accepted for publication).

(BibTeX)

M. Maroufi, S. O. R. Moheimani

An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors (Journal Article)

IEEE Sensors Journal, 17 (10), pp. 3030–3040, 2017.

(BibTeX | Links: )

M. G. Ruppert, A. G. Fowler, M. Maroufi, S. O. R. Moheimani

On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach (Journal Article)

IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215 - 225, 2017.

(BibTeX | Links: )

A. Bazaei, M. Maroufi, A. G. Fowler, S. O. R. Moheimani

Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners (Journal Article)

IEEE Transactions on Control Systems Technology, 24 (5), pp. 1717–1728, 2016.

(BibTeX | Links: )

M. Maroufi, S. O. R. Moheimani

A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors (Journal Article)

IEEE Sensors Journal, 16 (7), pp. 1908–1917, 2016.

(BibTeX | Links: )

A. Bazaei, M. Maroufi, S. O. R. Moheimani

On the modeling of tilted fixed-guided flexible beams under tension (Journal Article)

Acta Mechanica, 227 (2), pp. 333–352, 2016.

(BibTeX | Links: )

M. Maroufi, A. G. Fowler, S. O. R. Moheimani

MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design (Journal Article)

IEEE Journal of Microelectromechanical Systems, 24 (6), pp. 1730–1740, 2015.

(BibTeX | Links: )

M. Maroufi, A. Bazaei, A. Mohammadi, S. O. R. Moheimani

Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization (Journal Article)

IEEE Journal of Microelectromechanical Systems, 24 (5), pp. 1594–1604, 2015.

(BibTeX | Links: )

A. G. Fowler, M. Maroufi, S. O. R. Moheimani

A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy (Journal Article)

Review of Scientific Instruments, 86 (4), pp. 046107, 2015.

(BibTeX | Links: )

M. Maroufi, A. Bazaei, S. O. R. Moheimani

A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control (Journal Article)

IEEE Transactions on Control Systems Technology, 23 (2), pp. 504-512, 2015.

(BibTeX | Links: )

M. Maroufi, A. G. Fowler, A. Bazaei, S. O. R. Moheimani

High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM (Journal Article)

Review of Scientific Instruments, 86 (2), pp. 023705 (12pp), 2015.

(BibTeX | Links: )

A. Bazaei, M. Maroufi, A. Mohammadi, S. O. R. Moheimani

Displacement Sensing with Silicon Flexures in MEMS Nanopositioners (Journal Article)

IEEE Journal of Microelectromechanical Systems, 23 (3), pp. 502–504, 2014.

(BibTeX | Links: )

Inproceedings

M. G. Ruppert, M. Maroufi, A. Bazaei, S. O. R. Moheimani

Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner (Inproceeding)

20th IFAC World Congress, Toulouse, France, 2017.

(BibTeX)

A. Bazaei, M. Maroufi, S. O. R. Moheimani

Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method (Inproceeding)

20th IFAC World Congress, Toulouse, France, 2017.

(BibTeX)

M. Maroufi, M. G. Ruppert, A. G. Fowler, S. O. R. Moheimani

Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope (Inproceeding)

American Control Conference, Seattle, WA, USA, 2017.

(BibTeX)

M. Maroufi, S. O. R. Moheimani

Characterization of piezoresistive and electrothermal sensors in MEMS devices (Inproceeding)

IEEE Sensors Conference, Orlando, FL., USA, 2016.

(BibTeX | Links: )

M. Maroufi, S. O. R. Moheimani

Cross coupling in parallel kinematic MEMS nanopositioners (Inproceeding)

ASME Conference on Dynamic Systems and Control, Columbus , Ohio, USA, 2015.

(BibTeX)

A. Bazaei, A. G. Fowler, M. Maroufi, S. O. R. Moheimani

Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner (Inproceeding)

IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.

(BibTeX)

M. Maroufi, Y. K. Yong, S. O. R. Moheimani

Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors (Inproceeding)

IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.

(BibTeX)

A. Bazaei, M. Maroufi, S. O. R. Moheimani

Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift (Inproceeding)

Proc. American Control Conference, Chicago, IL, USA, 2015.

(BibTeX)

A. G. Fowler, M. Maroufi, A. Bazaei, S. O. R. Moheimani

MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy (Inproceeding)

ASME Dynamic Systems and Control Conference, San Antonio, Texas, USA, 2014.

(BibTeX)

A. Bazaei, M. Maroufi, A. Mohammadi, S. O. R. Moheimani

Development of a MEMS Position Transducer Using Bulk Piezoresistivity of Suspensions (Inproceeding)

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, 2014.

(BibTeX)

M. Maroufi, S. O. R. Moheimani

Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner (Inproceeding)

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013.

(BibTeX)