Research Associate

Mohammad Maroufi graduated with the B.Sc. degrees in Mechanical Engineering and Applied Physics as a distinguished student from Amirkabir University of Technology (Tehran Polytechnic) in 2008. He continued his studies in a Masters in Mechatronics at the same university, and graduated in 2011. He studied his PhD in Electrical Engineering at the University of Newcastle, Australia. He is currently a Research Associate in the Department of Mechanical Engineering at the University of Texas at Dallas. His research interests include the design and control of MEMS nanopositioning systems, MEMS based sensing and actuation, on-chip atomic force microscopy, and modeling of smart materials and structures.
Journal Articles | |
M. B. Coskun, A. G. Fowler, M. Maroufi, S. O. R. Moheimani On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers (Journal Article) IEEE Journal of Microelectromechanical Systems, 26 (6), pp. 1287 – 1297, 2017. (BibTeX | Links: @article{J17g, title = {On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers}, author = {M. B. Coskun and A. G. Fowler and M. Maroufi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08006210.pdf}, year = {2017}, date = {2017-12-04}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {26}, number = {6}, pages = {1287 -- 1297}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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M. Maroufi, A. G. Fowler, S. O. R. Moheimani MEMS for Nanopositioning: Design and Applications (Journal Article) IEEE Journal of Microelectromechanical Systems, 26 (3), pp. 469–500, 2017. (BibTeX | Links: @article{J17c, title = {MEMS for Nanopositioning: Design and Applications}, author = {M. Maroufi and A. G. Fowler and S. O. R. Moheimani }, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07904597-1.pdf}, doi = {10.1109/JMEMS.2017.2687861}, year = {2017}, date = {2017-08-01}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {26}, number = {3}, pages = {469--500}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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M. Maroufi, S. O. R. Moheimani An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors (Journal Article) IEEE Sensors Journal, 17 (10), pp. 3030–3040, 2017. (BibTeX | Links: @article{J17e, title = {An SOI-MEMS Piezoelectric Torsional Stage with Bulk Piezoresistive Sensors}, author = {M. Maroufi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07885544-1.pdf}, year = {2017}, date = {2017-05-15}, journal = {IEEE Sensors Journal}, volume = {17}, number = {10}, pages = {3030--3040}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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M. G. Ruppert, A. G. Fowler, M. Maroufi, S. O. R. Moheimani On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach (Journal Article) IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215 - 225, 2017. (BibTeX | Links: @article{J17a, title = {On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach}, author = {M. G. Ruppert and A. G. Fowler and M. Maroufi and S. O. R. Moheimani }, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07775031-2.pdf}, doi = {10.1109/JMEMS.2016.2628890}, year = {2017}, date = {2017-02-01}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {26}, number = {1}, pages = {215 - 225}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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A. Bazaei, M. Maroufi, A. G. Fowler, S. O. R. Moheimani Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners (Journal Article) IEEE Transactions on Control Systems Technology, 24 (5), pp. 1717–1728, 2016. (BibTeX | Links: @article{J16c, title = {Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners}, author = {A. Bazaei and M. Maroufi and A. G. Fowler and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07378919.pdf}, year = {2016}, date = {2016-09-01}, journal = {IEEE Transactions on Control Systems Technology}, volume = {24}, number = {5}, pages = {1717--1728}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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M. Maroufi, S. O. R. Moheimani A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors (Journal Article) IEEE Sensors Journal, 16 (7), pp. 1908–1917, 2016. (BibTeX | Links: @article{J16b, title = {A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors}, author = {M. Maroufi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07342875.pdf}, doi = {10.1109/JSEN.2015.2504846}, year = {2016}, date = {2016-04-01}, journal = {IEEE Sensors Journal}, volume = {16}, number = {7}, pages = {1908--1917}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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A. Bazaei, M. Maroufi, S. O. R. Moheimani On the modeling of tilted fixed-guided flexible beams under tension (Journal Article) Acta Mechanica, 227 (2), pp. 333–352, 2016. (BibTeX | Links: @article{J16h, title = {On the modeling of tilted fixed-guided flexible beams under tension}, author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani}, url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/J16c.pdf}, doi = {10.1007/s00707-015-1448-6}, year = {2016}, date = {2016-02-01}, journal = {Acta Mechanica}, volume = {227}, number = {2}, pages = {333--352}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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M. Maroufi, A. G. Fowler, S. O. R. Moheimani MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design (Journal Article) IEEE Journal of Microelectromechanical Systems, 24 (6), pp. 1730–1740, 2015. (BibTeX | Links: @article{J15h, title = {MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design}, author = { M. Maroufi and A. G. Fowler and S. O. R. Moheimani}, url = {http://reza.moheimani.org/lab/wp-content/uploads/07116478.pdf}, year = {2015}, date = {2015-12-01}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {24}, number = {6}, pages = {1730--1740}, key = {J15h}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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M. Maroufi, A. Bazaei, A. Mohammadi, S. O. R. Moheimani Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization (Journal Article) IEEE Journal of Microelectromechanical Systems, 24 (5), pp. 1594–1604, 2015. (BibTeX | Links: @article{j15j, title = {Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization}, author = { M. Maroufi and A. Bazaei and A. Mohammadi and S. O. R. Moheimani}, url = {http://reza.moheimani.org/lab/wp-content/uploads/J15j.pdf}, year = {2015}, date = {2015-10-14}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {24}, number = {5}, pages = {1594--1604}, key = {j15j}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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A. G. Fowler, M. Maroufi, S. O. R. Moheimani A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy (Journal Article) Review of Scientific Instruments, 86 (4), pp. 046107, 2015. (BibTeX | Links: @article{J15i, title = {A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy}, author = { A. G. Fowler and M. Maroufi and S. O. R. Moheimani}, url = {http://reza.moheimani.org/lab/wp-content/uploads/J15i.pdf}, year = {2015}, date = {2015-04-21}, journal = {Review of Scientific Instruments}, volume = {86}, number = {4}, pages = {046107}, key = {J15i}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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M. Maroufi, A. Bazaei, S. O. R. Moheimani A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control (Journal Article) IEEE Transactions on Control Systems Technology, 23 (2), pp. 504-512, 2015. (BibTeX | Links: @article{J15e, title = {A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control}, author = { M. Maroufi and A. Bazaei and S. O. R. Moheimani}, url = {http://reza.moheimani.org/lab/wp-content/uploads/J15e.pdf}, year = {2015}, date = {2015-03-01}, journal = {IEEE Transactions on Control Systems Technology}, volume = {23}, number = {2}, pages = {504-512}, key = {J15e}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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M. Maroufi, A. G. Fowler, A. Bazaei, S. O. R. Moheimani High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM (Journal Article) Review of Scientific Instruments, 86 (2), pp. 023705 (12pp), 2015. (BibTeX | Links: @article{J15g, title = {High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM}, author = { M. Maroufi and A. G. Fowler and A. Bazaei and S. O. R. Moheimani}, url = {http://reza.moheimani.org/lab/wp-content/uploads/J15g.pdf}, year = {2015}, date = {2015-01-01}, journal = {Review of Scientific Instruments}, volume = {86}, number = {2}, pages = {023705 (12pp)}, key = {J15g}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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A. Bazaei, M. Maroufi, A. Mohammadi, S. O. R. Moheimani Displacement Sensing with Silicon Flexures in MEMS Nanopositioners (Journal Article) IEEE Journal of Microelectromechanical Systems, 23 (3), pp. 502–504, 2014. (BibTeX | Links: @article{J14n, title = {Displacement Sensing with Silicon Flexures in MEMS Nanopositioners}, author = { A. Bazaei and M. Maroufi and A. Mohammadi and S. O. R. Moheimani}, url = {http://reza.moheimani.org/lab/wp-content/uploads/J14n.pdf}, year = {2014}, date = {2014-06-01}, journal = {IEEE Journal of Microelectromechanical Systems}, volume = {23}, number = {3}, pages = {502--504}, key = {J14n}, keywords = {}, pubstate = {published}, tppubtype = {article} } |
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Inproceedings | |
A. Bazaei, M. Maroufi, S. O. R. Moheimani Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control (Inproceeding) IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017. (BibTeX) @inproceedings{C17h, title = {Tracking of Constant-Linear-Velocity Spiral Trajectories by Approximate Internal Model Control}, author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani}, year = {2017}, date = {2017-08-28}, booktitle = {IEEE Conference on Control Technology and Applications}, address = {Hawaii, USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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M. Maroufi, H. Alemansour, S. O. R. Moheimani A Closed-Loop MEMS Force Sensor with Adjustable Stiffness (Inproceeding) IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017. (BibTeX) @inproceedings{C17i, title = {A Closed-Loop MEMS Force Sensor with Adjustable Stiffness}, author = {M. Maroufi and H. Alemansour and S. O. R. Moheimani }, year = {2017}, date = {2017-08-28}, booktitle = {IEEE Conference on Control Technology and Applications}, address = {Hawaii, USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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M. G. Ruppert, M. Maroufi, A. Bazaei, S. O. R. Moheimani Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner (Inproceeding) 20th IFAC World Congress, Toulouse, France, 2017. (BibTeX) @inproceedings{C17d, title = {Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner}, author = {M. G. Ruppert and M. Maroufi and A. Bazaei and S. O. R. Moheimani }, year = {2017}, date = {2017-07-10}, booktitle = {20th IFAC World Congress}, address = {Toulouse, France}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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A. Bazaei, M. Maroufi, S. O. R. Moheimani Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method (Inproceeding) 20th IFAC World Congress, Toulouse, France, 2017. (BibTeX) @inproceedings{C17e, title = {Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method}, author = {A. Bazaei and M. Maroufi and S. O. R. Moheimani }, year = {2017}, date = {2017-07-10}, booktitle = {20th IFAC World Congress}, address = {Toulouse, France}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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M. Maroufi, M. G. Ruppert, A. G. Fowler, S. O. R. Moheimani Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope (Inproceeding) American Control Conference, Seattle, WA, USA, 2017. (BibTeX) @inproceedings{C17c, title = {Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope}, author = {M. Maroufi and M. G. Ruppert and A. G. Fowler and S. O. R. Moheimani }, year = {2017}, date = {2017-05-24}, booktitle = {American Control Conference}, address = {Seattle, WA, USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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M. Maroufi, S. O. R. Moheimani Characterization of piezoresistive and electrothermal sensors in MEMS devices (Inproceeding) IEEE Sensors Conference, Orlando, FL., USA, 2016. (BibTeX | Links: @inproceedings{C16e, title = {Characterization of piezoresistive and electrothermal sensors in MEMS devices}, author = {M. Maroufi and S. O. R. Moheimani }, doi = { 10.1109/ICSENS.2016.7808953}, year = {2016}, date = {2016-10-30}, booktitle = {IEEE Sensors Conference}, address = {Orlando, FL., USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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M. Maroufi, S. O. R. Moheimani Cross coupling in parallel kinematic MEMS nanopositioners (Inproceeding) ASME Conference on Dynamic Systems and Control, Columbus , Ohio, USA, 2015. (BibTeX) @inproceedings{C15e, title = {Cross coupling in parallel kinematic MEMS nanopositioners}, author = {M. Maroufi and S. O. R. Moheimani}, year = {2015}, date = {2015-10-30}, booktitle = {ASME Conference on Dynamic Systems and Control}, address = {Columbus , Ohio, USA}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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A. Bazaei, A. G. Fowler, M. Maroufi, S. O. R. Moheimani Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner (Inproceeding) IEEE Multiconference on Systems and Control, Sydney, Australia, 2015. (BibTeX) @inproceedings{C15g, title = {Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner}, author = {A. Bazaei and A. G. Fowler and M. Maroufi and S. O. R. Moheimani}, year = {2015}, date = {2015-09-21}, booktitle = {IEEE Multiconference on Systems and Control}, address = {Sydney, Australia}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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M. Maroufi, Y. K. Yong, S. O. R. Moheimani Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors (Inproceeding) IEEE Multiconference on Systems and Control, Sydney, Australia, 2015. (BibTeX) @inproceedings{C15h, title = {Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors}, author = {M. Maroufi and Y. K. Yong and S. O. R. Moheimani}, year = {2015}, date = {2015-09-21}, booktitle = {IEEE Multiconference on Systems and Control}, address = {Sydney, Australia}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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A. Bazaei, M. Maroufi, S. O. R. Moheimani Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift (Inproceeding) Proc. American Control Conference, Chicago, IL, USA, 2015. (BibTeX) @inproceedings{C15b, title = {Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift}, author = { A. Bazaei and M. Maroufi and S. O. R. Moheimani}, year = {2015}, date = {2015-07-01}, booktitle = {Proc. American Control Conference}, address = {Chicago, IL, USA}, key = {C15b}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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A. G. Fowler, M. Maroufi, A. Bazaei, S. O. R. Moheimani MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy (Inproceeding) ASME Dynamic Systems and Control Conference, San Antonio, Texas, USA, 2014. (BibTeX) @inproceedings{C14k, title = {MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy}, author = { A. G. Fowler and M. Maroufi and A. Bazaei and S. O. R. Moheimani}, year = {2014}, date = {2014-10-01}, booktitle = {ASME Dynamic Systems and Control Conference}, address = {San Antonio, Texas, USA}, key = {C14k}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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A. Bazaei, M. Maroufi, A. Mohammadi, S. O. R. Moheimani Development of a MEMS Position Transducer Using Bulk Piezoresistivity of Suspensions (Inproceeding) Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, 2014. (BibTeX) @inproceedings{C14i, title = {Development of a MEMS Position Transducer Using Bulk Piezoresistivity of Suspensions}, author = { A. Bazaei and M. Maroufi and A. Mohammadi and S. O. R. Moheimani}, year = {2014}, date = {2014-07-01}, booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics}, address = {Besancon, France}, key = {C14i}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |
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M. Maroufi, S. O. R. Moheimani Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner (Inproceeding) Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013. (BibTeX) @inproceedings{C13i, title = {Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner}, author = { M. Maroufi and S. O. R. Moheimani}, year = {2013}, date = {2013-07-01}, booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics}, address = {Wollongong, Australia}, key = {C13i}, keywords = {}, pubstate = {published}, tppubtype = {inproceedings} } |