@inproceedings{C19d,
title = {Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array},
author = {M. B. Coskun and M. Baan and A. Alipour and S. O. R. Moheimani },
doi = {10.1109/CCTA.2019.8920686},
year = {2019},
date = {2019-08-19},
booktitle = {2019 IEEE Conference on Control Technology and Applications (CCTA)},
address = {Hong Kong, China},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}