Dr. Steven Moore’s Publications

Journal Articles

S. I. Moore; M. B. Coskun; T. Alan; A. Neild; S. O. R. Moheimani

Feedback Controlled MEMS Force Sensor for Characterization of Microcantilevers Journal Article

IEEE Journal of Microelectromechanical Systems, 24 (4), pp. 1092–1101, 2015.

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S. I. Moore; S. O. R. Moheimani

Vibration Control With MEMS Electrostatic Drives: A Self-Sensing Approach Journal Article

IEEE Transactions on Control Systems Technology, 23 (3), pp. 1237-1244, 2015.

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S. I. Moore; S. O. R. Moheimani

Displacement Measurement With a Self-Sensing MEMS Electrostatic Drive Journal Article

IEEE Journal of Microelectromechanical Systems, 23 (3), pp. 511–513, 2014.

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M. B. Coskun; S. I. Moore; S. O. R. Moheimani; A. Neild; T. Alan

Zero Displacement MEMS Force Sensor using Feedback Control Journal Article

Applied Physics Letters, 104 (15), pp. 153502 (4pp), 2014.

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Inproceedings

S. I. Moore; Y. K. Yong; S. O. R. Moheimani

Switched Self-Sensing Actuator for a MEMS Nanopositioner Inproceedings

IEEE-ICM International Conference on Mechatronics, Gippsland, Australia, 2017.

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S. I. Moore; S. O. R. Moheimani

A switched actuation and sensing method for a MEMS electrostatic drive Inproceedings

Proc. 2016 American Control Conference, 2016.

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M. B. Coskun; S. I. Moore; S. O. R. Moheimani; A. Neild; T. Alan

Force-Compensating MEMS Sensor for AFM Cantilever Stiffness Calibration Inproceedings

Proc. IEEE Sensors Conference, Valencia, Spain, 2014.

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S. I. Moore; S. O. R. Moheimani

Simultaneous Actuation and Sensing for Electrostatic Drives in MEMS using Frequency Modulated Capacitive Sensing Inproceedings

Proc. 19th IFAC World Congress, Cape Town, South Africa, 2014.

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S. I. Moore; S. O. R. Moheimani

Self-Sensing Electrostatic Drive in a MEMS Nanopositioner for the Application of Vibration Control Inproceedings

Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, 2014.

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S. I. Moore; S. O. R. Moheimani

MEMS Based Oscillator Incorporating A Displacement Sensor Inproceedings

Proc. Australian Control Conference, Perth, Australia, 2013.

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S. I. Moore; S. O. R. Moheimani

MEMS Resonator With Displacement Sensor Based On Thermal Principles Inproceedings

Proc. 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.

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