Journal Articles
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| M. B. Coskun; H. Alemansour; A. G. Fowler; M. Maroufi; S. O. R. Moheimani Q Control of an Active AFM CantileverWith Differential Sensing Configuration Journal Article IEEE Transactions on Control Systems Technology, 27 (5), pp. 2271 - 2278, 2019. BibTeX | Links:   @article{J17a,
title = {Q Control of an Active AFM CantileverWith Differential Sensing Configuration},
author = {M. B. Coskun and H. Alemansour and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08410617.pdf},
doi = {10.1109/TCST.2018.2850338},
year = {2019},
date = {2019-09-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {27},
number = {5},
pages = { 2271 - 2278},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. B. Coskun; A. G. Fowler; M. Maroufi; S. O. R. Moheimani On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers Journal Article IEEE Journal of Microelectromechanical Systems, 26 (6), pp. 1287 – 1297, 2017. BibTeX | Links: @article{J17g,
title = {On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers with Integrated Piezoelectric Transducers},
author = {M. B. Coskun and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/08006210.pdf},
year = {2017},
date = {2017-12-04},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {6},
pages = {1287 -- 1297},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; A. G. Fowler; S. O. R. Moheimani MEMS for Nanopositioning: Design and Applications Journal Article IEEE Journal of Microelectromechanical Systems, 26 (3), pp. 469–500, 2017. BibTeX | Links: @article{J17c,
title = {MEMS for Nanopositioning: Design and Applications},
author = {M. Maroufi and A. G. Fowler and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07904597-1.pdf},
doi = {10.1109/JMEMS.2017.2687861},
year = {2017},
date = {2017-08-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {3},
pages = {469--500},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. G. Ruppert; A. G. Fowler; M. Maroufi; S. O. R. Moheimani On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach Journal Article IEEE Journal of Microelectromechanical Systems, 26 (1), pp. 215 - 225, 2017. BibTeX | Links: @article{J17a,
title = {On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach},
author = {M. G. Ruppert and A. G. Fowler and M. Maroufi and S. O. R. Moheimani },
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07775031-2.pdf},
doi = {10.1109/JMEMS.2016.2628890},
year = {2017},
date = {2017-02-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {1},
pages = {215 - 225},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. G. Fowler; S. O. R. Moheimani A 4-DOF MEMS Energy Harvester Using Ultrasonic Excitation Journal Article IEEE Sensors Journal, 16 (21), pp. 7774–7783, 2016. BibTeX | Links: @article{J16f,
title = {A 4-DOF MEMS Energy Harvester Using Ultrasonic Excitation},
author = {A. G. Fowler and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07546878.pdf},
year = {2016},
date = {2016-11-01},
journal = {IEEE Sensors Journal},
volume = {16},
number = {21},
pages = {7774--7783},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Bazaei; M. Maroufi; A. G. Fowler; S. O. R. Moheimani Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners Journal Article IEEE Transactions on Control Systems Technology, 24 (5), pp. 1717–1728, 2016. BibTeX | Links: @article{J16c,
title = {Internal Model Control for Spiral Trajectory Tracking with MEMS AFM Scanners},
author = {A. Bazaei and M. Maroufi and A. G. Fowler and S. O. R. Moheimani},
url = {http://ldcn-mechatronics.net/lab/wp-content/uploads/07378919.pdf},
year = {2016},
date = {2016-09-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {24},
number = {5},
pages = {1717--1728},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; A. G. Fowler; S. O. R. Moheimani MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design Journal Article IEEE Journal of Microelectromechanical Systems, 24 (6), pp. 1730–1740, 2015. BibTeX | Links: @article{J15h,
title = {MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design},
author = { M. Maroufi and A. G. Fowler and S. O. R. Moheimani},
url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/07116478.pdf},
year = {2015},
date = {2015-12-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {24},
number = {6},
pages = {1730--1740},
key = {J15h},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. G. Fowler; M. Maroufi; S. O. R. Moheimani A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy Journal Article Review of Scientific Instruments, 86 (4), pp. 046107, 2015. BibTeX | Links: @article{J15i,
title = {A Silicon-on-Insulator MEMS Probe Scanner for On-Chip Atomic Force Microscopy},
author = { A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J15i.pdf},
year = {2015},
date = {2015-04-21},
journal = {Review of Scientific Instruments},
volume = {86},
number = {4},
pages = {046107},
key = {J15i},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Maroufi; A. G. Fowler; A. Bazaei; S. O. R. Moheimani High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM Journal Article Review of Scientific Instruments, 86 (2), pp. 023705 (12pp), 2015. BibTeX | Links: @article{J15g,
title = {High-Stroke Silicon-on-Insulator MEMS Nanopositioner: Control Design for Non-Raster Scan AFM},
author = { M. Maroufi and A. G. Fowler and A. Bazaei and S. O. R. Moheimani},
url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J15g.pdf},
year = {2015},
date = {2015-01-01},
journal = {Review of Scientific Instruments},
volume = {86},
number = {2},
pages = {023705 (12pp)},
key = {J15g},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| B. Piriyanont; A. G. Fowler; S. O. R. Moheimani Force-Controlled MEMS Rotary Micro-Gripper Journal Article IEEE Journal of Microelectromechanical Systems, 24 (4), pp. 1164–1172, 2015. BibTeX | Links: @article{J15a,
title = {Force-Controlled MEMS Rotary Micro-Gripper},
author = { B. Piriyanont and A. G. Fowler and S. O. R. Moheimani},
url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J15a.pdf},
year = {2015},
date = {2015-01-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {24},
number = {4},
pages = {1164--1172},
key = {J15a},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. G. Fowler; S. O. R. Moheimani; S. Behrens An Omnidirectional MEMS Ultrasonic Energy Harvester for Implanted Devices Journal Article IEEE Journal of Microelectromechanical Systems, 23 (6), pp. 1454–1462, 2014. BibTeX | Links: @article{J14l,
title = {An Omnidirectional MEMS Ultrasonic Energy Harvester for Implanted Devices},
author = { A. G. Fowler and S. O. R. Moheimani and S. Behrens},
url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J14l.pdf},
year = {2014},
date = {2014-12-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {23},
number = {6},
pages = {1454--1462},
key = {J14l},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| M. Rakotondrabe; A. G. Fowler; S. O. R. Moheimani Control of a Novel 2-DoF MEMS Nanopositioner with Electrothermal Actuation and Sensing Journal Article IEEE Transactions on Control Systems Technology, 22 (4), pp. 1486–1497, 2014. BibTeX | Links: @article{J14b,
title = {Control of a Novel 2-DoF MEMS Nanopositioner with Electrothermal Actuation and Sensing},
author = { M. Rakotondrabe and A. G. Fowler and S. O. R. Moheimani},
url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J14b.pdf},
year = {2014},
date = {2014-07-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {22},
number = {4},
pages = {1486--1497},
key = {J14b},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. Mohammadi; A. G. Fowler; Y. K. Yong; S. O. R. Moheimani A Feedback Controlled MEMS Nanopositioner for On-Chip High-Speed AFM Journal Article IEEE Journal of Microelectromechanical Systems, 23 (3), pp. 610–619, 2014. BibTeX | Links: @article{J14d,
title = {A Feedback Controlled MEMS Nanopositioner for On-Chip High-Speed AFM},
author = { A. Mohammadi and A. G. Fowler and Y. K. Yong and S. O. R. Moheimani},
url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J14d.pdf},
year = {2014},
date = {2014-06-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {23},
number = {3},
pages = {610--619},
key = {J14d},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. G. Fowler; S. O. R. Moheimani; S. Behrens Design and Characterization of a 2-DOF MEMS Ultrasonic Energy Harvester with Triangular Electrostatic Electrodes Journal Article IEEE Electron Device Letters, 34 (11), pp. 1421–1423, 2013. BibTeX | Links: @article{J13q,
title = {Design and Characterization of a 2-DOF MEMS Ultrasonic Energy Harvester with Triangular Electrostatic Electrodes},
author = { A. G. Fowler and S. O. R. Moheimani and S. Behrens},
url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J13q.pdf},
year = {2013},
date = {2013-11-01},
journal = {IEEE Electron Device Letters},
volume = {34},
number = {11},
pages = {1421--1423},
key = {J13q},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. G. Fowler; A. Bazaei; S. O. R. Moheimani Design and Analysis of Non-Uniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement Sensing Journal Article IEEE/ASME Journal of Microelectromechanical Systems, 22 (3), pp. 687–694, 2013. BibTeX | Links: @article{J13d,
title = {Design and Analysis of Non-Uniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement Sensing},
author = { A. G. Fowler and A. Bazaei and S. O. R. Moheimani},
url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J13d.pdf},
year = {2013},
date = {2013-06-01},
journal = {IEEE/ASME Journal of Microelectromechanical Systems},
volume = {22},
number = {3},
pages = {687--694},
key = {J13d},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. G. Fowler; S. O. R. Moheimani A 3-DOF SOI MEMS ultrasonic energy harvester for implanted devices Journal Article Journal of Physics: Conference Series, 476 (1), pp. (012002), 2013. BibTeX @article{J13r,
title = {A 3-DOF SOI MEMS ultrasonic energy harvester for implanted devices},
author = { A. G. Fowler and S. O. R. Moheimani},
year = {2013},
date = {2013-01-01},
journal = {Journal of Physics: Conference Series},
volume = {476},
number = {1},
pages = {(012002)},
key = {J13r},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
| A. G. Fowler; A. N. Laskovski; A. C. Hammond; S. O. R. Moheimani A 2-DoF Electrostatically Actuated MEMS Nanopositioner for On-Chip AFM Journal Article IEEE/ASME Journal of Microelectromechanical Systems, 21 (4), pp. 771–773, 2012, (DOI: 10.1109/JMEMS.2012.2191940). BibTeX | Links: @article{J12h,
title = {A 2-DoF Electrostatically Actuated MEMS Nanopositioner for On-Chip AFM},
author = { A. G. Fowler and A. N. Laskovski and A. C. Hammond and S. O. R. Moheimani},
url = {https://ldcn-mechatronics.net/lab/wp-content/uploads/J12h.pdf},
year = {2012},
date = {2012-08-01},
journal = {IEEE/ASME Journal of Microelectromechanical Systems},
volume = {21},
number = {4},
pages = {771--773},
key = {J12h},
note = {DOI: 10.1109/JMEMS.2012.2191940},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
|
Inproceedings
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| M. Maroufi; A. G. Fowler; S. O. R. Moheimani MEMS in Nanopositioning Inproceedings 16th International Conference on New Actuators, ACTUATOR 2018 , Bremen, Germany, 2018. BibTeX @inproceedings{C18a,
title = {MEMS in Nanopositioning},
author = {M. Maroufi and A. G. Fowler and S. O. R. Moheimani },
year = {2018},
date = {2018-06-25},
booktitle = {16th International Conference on New Actuators, ACTUATOR 2018 },
address = {Bremen, Germany},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. G. Fowler; M. B. Coskun; S. O. R. Moheimani Q Control of a Microfabricated Piezoelectric Cantilever with On-Chip Feedthrough Cancellation Inproceedings IEEE Conference on Control Technology and Applications, Hawaii, USA, 2017. BibTeX @inproceedings{C17g,
title = {Q Control of a Microfabricated Piezoelectric Cantilever with On-Chip Feedthrough Cancellation},
author = {A. G. Fowler and M. B. Coskun and S. O. R. Moheimani},
year = {2017},
date = {2017-08-28},
booktitle = {IEEE Conference on Control Technology and Applications},
address = {Hawaii, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Maroufi; M. G. Ruppert; A. G. Fowler; S. O. R. Moheimani Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope Inproceedings American Control Conference, Seattle, WA, USA, 2017. BibTeX @inproceedings{C17c,
title = {Design and Control of a Single-Chip SOI-MEMS Atomic Force Microscope},
author = {M. Maroufi and M. G. Ruppert and A. G. Fowler and S. O. R. Moheimani },
year = {2017},
date = {2017-05-24},
booktitle = {American Control Conference},
address = {Seattle, WA, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| F. Tajaddodianfar; A. G. Fowler; S. O. R. Moheimani; E. Fuchs; J. N. Randall Frequency-Domain Closed-Loop System Identification of a Scanning Tunneling Microscope Inproceedings Proc. 2016 ASPE Spring Topical Meeting Precision Mechatronic System Design and Control, Boston, MA, 2016. BibTeX @inproceedings{C16d,
title = {Frequency-Domain Closed-Loop System Identification of a Scanning Tunneling Microscope},
author = {F. Tajaddodianfar and A. G. Fowler and S. O. R. Moheimani and E. Fuchs and J. N. Randall },
year = {2016},
date = {2016-04-20},
booktitle = {Proc. 2016 ASPE Spring Topical Meeting Precision Mechatronic System Design and Control},
address = {Boston, MA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei; A. G. Fowler; M. Maroufi; S. O. R. Moheimani Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner Inproceedings IEEE Multiconference on Systems and Control, Sydney, Australia, 2015. BibTeX @inproceedings{C15g,
title = {Tracking of Spiral Trajectories Beyond Scanner Resonance Frequency by a MEMS Nanopositioner},
author = {A. Bazaei and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
year = {2015},
date = {2015-09-21},
booktitle = {IEEE Multiconference on Systems and Control},
address = {Sydney, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. G. Fowler; S. O. R. Moheimani 4-DOF SOI-MEMS Ultrasonic Energy Harvester Inproceedings Proc. IEEE Conference on Nanotechnology, Rome, Italy, 2015. BibTeX @inproceedings{C15c,
title = {4-DOF SOI-MEMS Ultrasonic Energy Harvester},
author = {A. G. Fowler and S. O. R. Moheimani},
year = {2015},
date = {2015-07-01},
booktitle = {Proc. IEEE Conference on Nanotechnology},
address = {Rome, Italy},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. G. Fowler; M. Maroufi; A. Bazaei; S. O. R. Moheimani MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy Inproceedings ASME Dynamic Systems and Control Conference, San Antonio, Texas, USA, 2014. BibTeX @inproceedings{C14k,
title = {MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy},
author = { A. G. Fowler and M. Maroufi and A. Bazaei and S. O. R. Moheimani},
year = {2014},
date = {2014-10-01},
booktitle = {ASME Dynamic Systems and Control Conference},
address = {San Antonio, Texas, USA},
key = {C14k},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei; A. G. Fowler; S. O. R. Moheimani Nonlinear Analysis of Electrothermal Position Sensors with Contoured Heaters Inproceedings Proc. IEEE Sensors Conference, Baltimore, Maryland, USA, 2013. BibTeX @inproceedings{C13q,
title = {Nonlinear Analysis of Electrothermal Position Sensors with Contoured Heaters},
author = { A. Bazaei and A. G. Fowler and S. O. R. Moheimani},
year = {2013},
date = {2013-11-01},
booktitle = {Proc. IEEE Sensors Conference},
address = {Baltimore, Maryland, USA},
key = {C13q},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. G. Fowler; S. O. R. Moheimani; S. Behrens A MEMS Electromagnetic Energy Harvester using Ultrasonic Excitation Inproceedings Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013. BibTeX @inproceedings{C13h,
title = {A MEMS Electromagnetic Energy Harvester using Ultrasonic Excitation},
author = { A. G. Fowler and S. O. R. Moheimani and S. Behrens},
year = {2013},
date = {2013-07-01},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},
address = {Wollongong, Australia},
key = {C13h},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. G. Fowler; M. Rakotondrabe; S. O. R. Moheimani Closed-Loop Control of a Novel 2-DOF MEMS Nanopositioner with Electrothermal Actuation Inproceedings Proc. 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013. BibTeX @inproceedings{C13a,
title = {Closed-Loop Control of a Novel 2-DOF MEMS Nanopositioner with Electrothermal Actuation},
author = { A. G. Fowler and M. Rakotondrabe and S. O. R. Moheimani},
year = {2013},
date = {2013-04-01},
booktitle = {Proc. 6th IFAC Symposium on Mechatronic Systems},
address = {Hangzhou, China},
key = {C13a},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| Y. K. Yong; A. G. Fowler; A. Mohammadi; S. O. R. Moheimani Control of a MEMS Nanopositioner for Atomic Force Microscopy Inproceedings Proc. 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013. BibTeX @inproceedings{C13c,
title = {Control of a MEMS Nanopositioner for Atomic Force Microscopy},
author = { Y. K. Yong and A. G. Fowler and A. Mohammadi and S. O. R. Moheimani},
year = {2013},
date = {2013-04-01},
booktitle = {Proc. 6th IFAC Symposium on Mechatronic Systems},
address = {Hangzhou, China},
key = {C13c},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. Bazaei; A. G. Fowler; S. O. R. Moheimani Improved Electrothermal Position Sensing in MEMS with Non-uniformly Shaped Heaters Inproceedings Proc. IEEE Sensors Conference, Taipei, Taiwan, 2012. BibTeX @inproceedings{C12h,
title = {Improved Electrothermal Position Sensing in MEMS with Non-uniformly Shaped Heaters},
author = { A. Bazaei and A. G. Fowler and S. O. R. Moheimani},
year = {2012},
date = {2012-10-01},
booktitle = {Proc. IEEE Sensors Conference},
address = {Taipei, Taiwan},
key = {C12h},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| A. G. Fowler; S. O. R. Moheimani; S. Behrens A 3-DoF MEMS Ultrasonic Energy Harvester Inproceedings Proc. IEEE Sensors Conference, Taipei, Taiwan, 2012. BibTeX @inproceedings{C12f,
title = {A 3-DoF MEMS Ultrasonic Energy Harvester},
author = { A. G. Fowler and S. O. R. Moheimani and S. Behrens},
year = {2012},
date = {2012-10-01},
booktitle = {Proc. IEEE Sensors Conference},
address = {Taipei, Taiwan},
key = {C12f},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| M. Rakotondrabe; A. G. Fowler; S. O. R. Moheimani Characterization of a 2-dof Electrothermal MEMS with Integrated Actuation and Sensing Capability Inproceedings Proc. IEEE Sensors Conference, Taipei, Taiwan, 2012. BibTeX @inproceedings{C12i,
title = {Characterization of a 2-dof Electrothermal MEMS with Integrated Actuation and Sensing Capability},
author = { M. Rakotondrabe and A. G. Fowler and S. O. R. Moheimani},
year = {2012},
date = {2012-10-01},
booktitle = {Proc. IEEE Sensors Conference},
address = {Taipei, Taiwan},
key = {C12i},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|
| S. O. R. Moheimani; A. C. Hammond; A. N. Laskovski; A. G. Fowler MEMS Nanopositioning for On-Chip Atomic Force Microscopy Inproceedings Proc. International Conference On Nanoscience and Nanotechnology, Perth, Australia, 2012. BibTeX @inproceedings{C12b,
title = {MEMS Nanopositioning for On-Chip Atomic Force Microscopy},
author = { S. O. R. Moheimani and A. C. Hammond and A. N. Laskovski and A. G. Fowler},
year = {2012},
date = {2012-02-01},
booktitle = {Proc. International Conference On Nanoscience and Nanotechnology},
address = {Perth, Australia},
key = {C12b},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
|